Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2014专题

	Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass
	Wang, Linqing ; Wang, Weiyan ; Huang, Jinhua ; Zeng, Yuheng ; Tan, Ruiqin ; Song, Weijie ; Chen, Jianmin
刊名	JOURNAL OF NON-CRYSTALLINE SOLIDS
	2014
卷号	388 页码:86
中文摘要	Hydrogenated microcrystalline silicon (mu c-Si:H) thin films were deposited on glass by magnetron sputtering at the substrate temperature of 100 degrees C and the hydrogen dilution ratio of 65%. The crystallinity and microstructure of thin films were systematically studied using Raman spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), and Fourier transform infrared spectroscopy (FT-IR). The results showed that the mu c-Si:H thin film was amorphous and hydrogen-rich at the initial stage of the growth. This amorphous layer was crystallized during further growth. The crystallinity of thin films is not almost changed with the increase of thickness when the thickness of thin film exceeds 70 nm. Finally, the mu c-Si:H thin film without amorphous incubation layer was obtained. The possible growth mechanism of fabricating mu c-Si:H thin films without amorphous incubation layers was also discussed. (C) 2014 Elsevier B.V. All rights reserved.
公开日期	2015-09-20
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/11903]
专题	宁波材料技术与工程研究所_2014专题
推荐引用方式 GB/T 7714	Wang, Linqing,Wang, Weiyan,Huang, Jinhua,et al. Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2014,388:86.
APA	Wang, Linqing.,Wang, Weiyan.,Huang, Jinhua.,Zeng, Yuheng.,Tan, Ruiqin.,...&Chen, Jianmin.(2014).Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass.JOURNAL OF NON-CRYSTALLINE SOLIDS,388,86.
MLA	Wang, Linqing,et al."Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass".JOURNAL OF NON-CRYSTALLINE SOLIDS 388(2014):86.