A Novel strategy to enhance micro/nano-tribological properties of DLC film by combining micro-pattern and thin ionic liquids film

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	A Novel strategy to enhance micro/nano-tribological properties of DLC film by combining micro-pattern and thin ionic liquids film
	Zhao WJ(赵文杰)1,2; Pu JB(蒲吉斌)2 ; Yu, Quanyao 1; Ceng ZX(曾志翔)1; Wu, Xuedong 1; Xue QJ(薛群基)1
刊名	Colloids and Surfaces A: Physicochemical and Engineering Aspects
	2013
卷号	428 页码:70-78
关键词	Diamond-like film Ionic liquids film Micro-groove pattern Micro/nano-tribology Synergetic lubricating films Atomic force microscopy
ISSN号	0927-7757
英文摘要	Both of surface topography and chemical composition play important roles in affecting the adhesive force and friction force in micro/nano-electromechanical systems (M/NEMS). Two effective approaches of reducing adhesion and friction of contacting interfaces are to create patterned surface and lower surface energy, which are especially beneficial for M/NEMS production yield and product reliability. Diamond-like carbon (DLC) films with high hardness, low friction coefficient and good wear resistance have aroused particular interest as protective film. Also, ionic liquids (ILs) display better tribological properties than that of conventional lubricants, such as PFPE and X-1 P. In this article, we present a novel method to fabricate the micro-patterned DLC-IL films by combination of by combination of inductively coupled plasma (ICP) etching method, magnetron sputtering technology and dip-coating method. DLC films with different packing density micro-grooves were prepared by controlling the photolithography design. The morphologies and surface chemical states of DLC and DLC-IL films were characterized by atomic force microscope (AFM), XPS and Raman. The adhesion and friction on the as-prepared DLC and DLC-IL films were studied by colloidal probe mounted on AFM cantilever in contact mode. The microtribological behaviors of the DLC and DLC-IL films were evaluated by UMT-3 tribometer in a ball-on-plate reciprocating mode. The experimental results showed that adhesive force and friction force of the DLC films with micro-grooves reduced effectively with increase of groove area density and incorporation of thin ILs film. The corresponding synergetic anti-adhesion and friction reduction mechanisms of surface pattern and chemical modification were discussed and clarified with emphasis. The lowered adhesion and friction force were attributed to two factors including (1) the reduced real area of contact between DLC films and colloidal tip; (2) incorporation of thin ILs films to avoid direct contact between DLC films and colloidal tip, which facilitating the sliding of colloidal tip on DLC films.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Nature Science Foundation (51202263);the China Postdoctoral Science Foundation (20110491832);Ningbo Municipal Nature Science Foundation (2011A610098);Outstanding Talent Recruiting Program from Ningbo Municipal Government (2009A31004);Open Fund of the State Key Laboratory of Solid Lubrication, Chinese Academy of Science (1004)
语种	英语
WOS记录号	WOS:000319637700011
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/13223]
专题	兰州化学物理研究所_固体润滑国家重点实验室
作者单位	1.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo Key Lab Marine Protect Mat, Ningbo 315201, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
推荐引用方式 GB/T 7714	Zhao WJ,Pu JB,Yu, Quanyao,et al. A Novel strategy to enhance micro/nano-tribological properties of DLC film by combining micro-pattern and thin ionic liquids film[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects,2013,428:70-78.
APA	Zhao WJ,Pu JB,Yu, Quanyao,Ceng ZX,Wu, Xuedong,&Xue QJ.(2013).A Novel strategy to enhance micro/nano-tribological properties of DLC film by combining micro-pattern and thin ionic liquids film.Colloids and Surfaces A: Physicochemical and Engineering Aspects,428,70-78.
MLA	Zhao WJ,et al."A Novel strategy to enhance micro/nano-tribological properties of DLC film by combining micro-pattern and thin ionic liquids film".Colloids and Surfaces A: Physicochemical and Engineering Aspects 428(2013):70-78.