METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 工业控制网络与系统研究室

	METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE
	Yu HB(于海斌); Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
	2012-04-19
专利国别	世界专利组织
专利号	WO2012048491A1
专利类型	发明
产权排序	1
权利人	中国科学院沈阳自动化研究所
其他题名	面向IC装备控制软件的GUI平台化实现方法
中文摘要	The present invention relates to a method for implementing Graphical User Interface (GUI) platform for integrate circuit (IC) equipment controlling software, which includes the following steps: developing corresponding IC equipment driver module and drawing GUI platform interface according to the characteristics of the IC equipments produced by different manufacturers connecting the monitor mainframe of the IC equipment with a controller through the IC equipment driver module and forming a communication network and, reading/writing controller data through the communication network by the IC equipment driver module, and mapping the data to universal data layer of the GUI platform. The GUI platform interface uses the universal data layer to perform data real-time display, control and abnormity processing, and thus, the GUI platform for the IC equipment control software is implemented. The present invention implements cross-platform mechanism, improves the cluster monitoring capacity of wafer manufacture equipment, satisfies the user demand of flexible construction and configuration of Human-Machine interface of corresponding control system, enables rapid construction of the whole producing process in a short time, and ensure the demand of producing startup ahead of time.
是否PCT专利	是
申请日期	2010-11-29
语种	英语
专利申请号	WO2010CN79216
内容类型	专利
源URL	[http://ir.sia.cn/handle/173321/12860]
专题	沈阳自动化研究所_工业控制网络与系统研究室
推荐引用方式 GB/T 7714	Yu HB,Xu AD,Liu MZ,et al. METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE. WO2012048491A1. 2012-04-19.