Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching

	Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching
	Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen
刊名	nanotechnology
	2013
卷号	24 期号:33 页码:335301
学科主题	半导体器件
收录类别	SCI
语种	英语
公开日期	2014-04-09
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/24789]
专题	半导体研究所_中科院半导体照明研发中心
推荐引用方式 GB/T 7714	Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen. Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching[J]. nanotechnology,2013,24(33):335301.
APA	Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen.(2013).Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching.nanotechnology,24(33),335301.
MLA	Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen."Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching".nanotechnology 24.33(2013):335301.