Fabrication of Sub-20 nm Width Ferromagnetic Nanocontact Structures by Shadow Evaporation

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	Fabrication of Sub-20 nm Width Ferromagnetic Nanocontact Structures by Shadow Evaporation
	Yao, ZN ; Yang, HF ; Li, WX ; Li, JJ ; Cui, AJ ; Gu, CZ
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2013
卷号	13 期号:2 页码:1199
关键词	Ferromagnetic Nanocontact Shadow Evaporation Electron Beam Lithography
ISSN号	1533-4880
通讯作者	Gu, CZ (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China.
中文摘要	The movement of the magnetic domain wall could result in the changing of the contact resistance. Such a resistance change is named as the domain wall Magnetoresistance (DWMR), which can be used as a basic signal of nanodevices. For application, a large DWMR is necessary to improve the device performance. An approach to improve the DWMR value is to fabricate magnetic structures with narrow contact width. However, due to the proximity effect during the process of electron beam lithography (EBL), it is not easy to fabricate sub-20 nm width structures by EBL technique directly. In this paper, we investigated the fabrication of sub-20 nm width nanocontact structures by combined techniques of EBL and shadow evaporation. Upon optimizing the resist thickness, opening width, and the evaporation angle, the contact width was tuned and the corresponding variation trends with these parameters were explored. Using the optimized fabrication conditions, 14 nm wide ferromagnetic contact structures were successfully fabricated.
资助信息	National Natural Science Foundation of China [50825206, 1083401, 60871045]
语种	英语
公开日期	2014-01-16
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/57004]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Yao, ZN,Yang, HF,Li, WX,et al. Fabrication of Sub-20 nm Width Ferromagnetic Nanocontact Structures by Shadow Evaporation[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2013,13(2):1199.
APA	Yao, ZN,Yang, HF,Li, WX,Li, JJ,Cui, AJ,&Gu, CZ.(2013).Fabrication of Sub-20 nm Width Ferromagnetic Nanocontact Structures by Shadow Evaporation.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,13(2),1199.
MLA	Yao, ZN,et al."Fabrication of Sub-20 nm Width Ferromagnetic Nanocontact Structures by Shadow Evaporation".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 13.2(2013):1199.