Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

CORC > 物理研究所 > 物理所公开发表论文 > 期刊论文

	Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process
	Wu, YL ; Deng, H ; Yu, HF ; Xue, GM ; Tian, Y ; Li, J ; Chen, YF ; Zhao, SP ; Zheng, DN
刊名	CHINESE PHYSICS B
	2013
卷号	22 期号:6
关键词	Josephson junction Al/AlOx/Al superconducting qubit
ISSN号	1674-1056
通讯作者	Zheng, DN (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China.
中文摘要	Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks: Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (j(c)) and wide range of junction sizes from 0.01 mu m(2) up to 1 mu m(2). We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.
资助信息	Science Foundation of the Ministry of Science and Technology of China [2011CBA00106, 2009CB929102]; National Natural Science Foundation of China [11104333, 10974243, 11161130519]; Knowledge Innovation Program of the Chinese Academy of Sciences
语种	英语
公开日期	2014-01-16
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/56999]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Wu, YL,Deng, H,Yu, HF,et al. Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process[J]. CHINESE PHYSICS B,2013,22(6).
APA	Wu, YL.,Deng, H.,Yu, HF.,Xue, GM.,Tian, Y.,...&Zheng, DN.(2013).Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.CHINESE PHYSICS B,22(6).
MLA	Wu, YL,et al."Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process".CHINESE PHYSICS B 22.6(2013).