A simple and efficient method for preparing silicon nanopit arrays

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	A simple and efficient method for preparing silicon nanopit arrays
	Dai, LG ; Xuan, MD ; Ding, P ; Jia, HQ ; Zhou, JM ; Chen, H
刊名	ACTA PHYSICA SINICA
	2013
卷号	62 期号:15
关键词	laser interference lithography nanoarrays etching fluorocarbon organic polymer
ISSN号	1000-3290
通讯作者	Chen, H (reprint author), Chinese Acad Sci, Beijing Natl Lab Condense Matter Phys, Beijing Key Lab New Energy Mat & Devices, Key Lab Renewable Energy,Inst Phys, Beijing 100190, Peoples R China.
中文摘要	This article presents a simple and efficient method for preparing silicon nanopit arrays structure using laser interference lithography (LIL). Highly ordered nanopit arrays in two dimensions were fabricated on 2 inch Si (001) substrate by LIL and in combination with dry etching and wet etching processes. Dot arrays were directly etched to nanopit arrays with this method, which omitted the necessary steps of metal deposition and lift off in pattern reversal process. Forming a fluorocarbon organic polymer layer on silicon surface after dry etching, which can be used as a wet etching mask, and producing a thin silicon mesa layer under the SiO2 dot arrays by slight over-etching in dry etching process, are two key steps for this method. SEM images show the uniform and controllable pit arrays were prepared; the period of the arrays is 450 nm, the length of the pit is 200-280 nm. The pit arrays are composes of square and inverted pyramids, and the four facets of the inverted pyramid correspond to four crystal planes (111) of Si substrate.
资助信息	National Natural Science Foundation of China [11204360, 61210014]; National High Technology Research and Development Program of China [2011AA03A112, 2011AA03A106]
语种	中文
公开日期	2014-01-16
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/56744]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Dai, LG,Xuan, MD,Ding, P,et al. A simple and efficient method for preparing silicon nanopit arrays[J]. ACTA PHYSICA SINICA,2013,62(15).
APA	Dai, LG,Xuan, MD,Ding, P,Jia, HQ,Zhou, JM,&Chen, H.(2013).A simple and efficient method for preparing silicon nanopit arrays.ACTA PHYSICA SINICA,62(15).
MLA	Dai, LG,et al."A simple and efficient method for preparing silicon nanopit arrays".ACTA PHYSICA SINICA 62.15(2013).