Synthesis of crystalline C3N4 by MPCVD

CORC > 物理研究所 > 物理所公开发表论文 > 期刊论文

	Synthesis of crystalline C3N4 by MPCVD
	Shi, DX ; Zhang, XF ; Yuan, L ; Gu, YS ; Zhang, YP ; Duan, ZJ ; Chang, XR ; Tian, ZZ ; Chen, NX
刊名	APPLIED SURFACE SCIENCE
	1999
卷号	148 期号:1-2 页码:50
关键词	CARBON NITRIDE FILMS CHEMICAL-VAPOR-DEPOSITION ION-IMPLANTATION SILICON SOLIDS GROWTH
ISSN号	0169-4332
通讯作者	Shi, DX (reprint author), Chinese Acad Sci, Inst Phys, Ctr Condensed Matter Phys, Beijing Lab Vacuum Phys, POB 2724, Beijing 100080, Peoples R China.
中文摘要	In this study, carbon nitride thin films are synthesized on Si and Pt substrates by microwave plasma chemical vapor deposition (MPCVD). The major part of the films is composed of alpha-C3N4 and beta-C3N4. XPS and FT-IR spectra strongly support the existence of C-N covalent bonds in C3N4. Raman spectra also support the existence of beta-C3N4. The carbon nitride films on Pt substrates have a high bulk modulus of 349 GPa. (C) 1999 Published by Elsevier Science B.V. All rights reserved.
收录类别	SCI
语种	英语
公开日期	2013-09-24
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/54429]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Shi, DX,Zhang, XF,Yuan, L,et al. Synthesis of crystalline C3N4 by MPCVD[J]. APPLIED SURFACE SCIENCE,1999,148(1-2):50.
APA	Shi, DX.,Zhang, XF.,Yuan, L.,Gu, YS.,Zhang, YP.,...&Chen, NX.(1999).Synthesis of crystalline C3N4 by MPCVD.APPLIED SURFACE SCIENCE,148(1-2),50.
MLA	Shi, DX,et al."Synthesis of crystalline C3N4 by MPCVD".APPLIED SURFACE SCIENCE 148.1-2(1999):50.