Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions

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	Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions
	Azarov, AY ; Svensson, BG ; Hallen, A ; Du, XL ; Kuznetsov, AY
刊名	JOURNAL OF APPLIED PHYSICS
	2010
卷号	108 期号:3
关键词	BOMBARDMENT SOLIDS MGO
ISSN号	0021-8979
通讯作者	Azarov, AY: Univ Oslo, Dept Phys, POB 1048 Blindern, NO-0316 Oslo, Norway.
中文摘要	Thin films of wurtzite Mg(x)Zn(1-x)O (x <= 0.3) grown by molecular beam epitaxy and wurtzite Cd(x)Zn(1-x)O (x <= 0.05) grown by metal organic chemical vapor deposition were implanted at room temperature with 150 keV Er(+) ions and 200 keV Au(+) ions in a wide dose range. Damage accumulation was studied by Rutherford backscattering/channeling spectrometry. Results show that the film composition affects the damage accumulation behavior in both MgZnO and CdZnO dramatically. In particular, increasing the Mg content in MgZnO results in enhanced damage accumulation in the region between the bulk and surface damage peaks characteristically distinguished in the pure ZnO. However, the overall damage accumulation in MgZnO layers, as well as in pure ZnO, exhibits saturation with increasing ion dose and MgZnO cannot be amorphized even at the highest ion dose used (3 X 10(16) Er/cm(2)). Increasing the Cd content in CdZnO affects the saturation stage of the damage accumulation and leads to an enhancement of damage production in both Cd and Zn sublattices. (C) 2010 American Institute of Physics. [doi:10.1063/1.3467532]
收录类别	SCI
资助信息	Norwegian Research Council; NordForsk; Chinese Academy of Science
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/36386]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Azarov, AY,Svensson, BG,Hallen, A,et al. Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions[J]. JOURNAL OF APPLIED PHYSICS,2010,108(3).
APA	Azarov, AY,Svensson, BG,Hallen, A,Du, XL,&Kuznetsov, AY.(2010).Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions.JOURNAL OF APPLIED PHYSICS,108(3).
MLA	Azarov, AY,et al."Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions".JOURNAL OF APPLIED PHYSICS 108.3(2010).