A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment

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	A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment
	Wang, P ; Li, J ; Chen, YF ; Li, S ; Wang, J ; Xie, TY ; Zheng, DN
刊名	CHINESE PHYSICS B
	2009
卷号	18 期号:4 页码:1679
关键词	PULSED-LASER DEPOSITION THIN-FILMS BUFFER LAYERS EPITAXIAL-GROWTH TEMPERATURE SURFACE SI
ISSN号	1674-1056
通讯作者	Zheng, DN: Chinese Acad Sci, Inst Phys, Natl Lab Superconduct, Beijing 100190, Peoples R China.
中文摘要	Highly epitaxial YBa2Cu3O7-delta (YBCO) and yttria-stabilized zirconia (YSZ) bilayer thin films have been deposited on silicon-on-insulator (SOI) substrates by using in situ pulsed laser deposition (PLD) technique. In the experiment, the native amorphous SiO2 layers on some of the SOI substrates are removed by dipping them in a 10% HF solution for 15s. Comparing several qualities of films grown on substrates with or without HF pretreatment, such as thin film crystallinity, general surface roughness, temperature dependence of resistance, surface morphology, as well as average crack spacing and crack width, naturally leads to the conclusion that preserving the native SiO2 layer on the surface of the SOI substrate can not only simplify the experimental process but can also achieve fairly high quality YSZ and YBCO thin films.
收录类别	SCI
资助信息	National Natural Science Foundation of China [50672125, 10574154]; Natural Science Foundation of Shanxi Province, China [2009011003-1]; Youth Foundation of Shanxi Datong University, China [2007Q10]
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/32859]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Wang, P,Li, J,Chen, YF,et al. A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment[J]. CHINESE PHYSICS B,2009,18(4):1679.
APA	Wang, P.,Li, J.,Chen, YF.,Li, S.,Wang, J.,...&Zheng, DN.(2009).A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment.CHINESE PHYSICS B,18(4),1679.
MLA	Wang, P,et al."A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment".CHINESE PHYSICS B 18.4(2009):1679.