Effect of rapid thermal annealing condition on the structure and conductivity properties of polycrystalline silicon films on glass | |
Wang WY ; Huang JH ; Zhang XP ; Song WJ ; Tan RQ | |
2010 | |
公开日期 | 2011-07-27 |
内容类型 | 期刊论文 |
源URL | [http://ir.nimte.ac.cn/handle/174433/2764] |
专题 | 宁波材料技术与工程研究所_宁波所知识产出 |
推荐引用方式 GB/T 7714 | Wang WY,Huang JH,Zhang XP,et al. Effect of rapid thermal annealing condition on the structure and conductivity properties of polycrystalline silicon films on glass[J],2010. |
APA | Wang WY,Huang JH,Zhang XP,Song WJ,&Tan RQ.(2010).Effect of rapid thermal annealing condition on the structure and conductivity properties of polycrystalline silicon films on glass.. |
MLA | Wang WY,et al."Effect of rapid thermal annealing condition on the structure and conductivity properties of polycrystalline silicon films on glass".(2010). |
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