Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
	Chen JM(陈建敏)1 ; Wang YJ(王永军)1,2; Li HX(李红轩)1 ; Ji L(吉利)1 ; Wu YX(吴艳霞)1,2 ; Lv YH(吕艳红)1,2; Liu XH(刘晓红)1 ; Fu YY(付英英)1,2 ; Zhou HD(周惠娣)1
刊名	Tribology letters
	2013
卷号	49 期号:1 页码:47-59
关键词	Magnetron sputtering Graphite-like carbon Titanium carbides Microstructure Properties
ISSN号	1023-8883
通讯作者	陈建敏 ; 王永军
英文摘要	A series of graphite-like carbon films with a titanium concentration of about 3.0 at.% were successfully deposited on silicon wafer substrates using an unbalanced magnetron sputtering system with different bias voltages. The microstructure, surface morphology, and properties of the titanium-containing graphite-like carbon films were subsequently studied using different characterization techniques. The results show that the resulting titanium-containing graphite-like carbon films are completely dominated by sp² sites and that these films have moderate hardness, lowinternal stress, and superior tribological properties with low friction and a high load-bearing capacity. The hardness (H), elastic modulus (E), H/E, H³/E², and internal stress of the titaniumcontaining graphite-like carbon films initially increase with increasing bias voltage, only to be followed by a decrease with further increases in the bias voltage. Tribologically, the studied carbon film shows a slight increase in friction with increasing bias voltage, while the wear rate initially decreases, followed by an obvious increase. The tribological properties of the studied titanium-containing graphite-like carbon films are greatly improved under the liquid paraffin-lubricated condition, achieving extremely low friction (～0.045) and wear (～10^-⁹ mm³/Nm). The effect of bias voltage on the microstructure and properties of the titanium-containing graphite-like carbon films is discussed in detail.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (Grant No. 51175491;No. 50575217);the Innovative Group Foundation from NSFC (Grant No. 50421502);the National 973 Project (No. 2007 CB607601)
语种	英语
WOS记录号	WOS:000312666000006
公开日期	2013-12-09
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4566]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Chen JM,Wang YJ,Li HX,et al. Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering[J]. Tribology letters,2013,49(1):47-59.
APA	Chen JM.,Wang YJ.,Li HX.,Ji L.,Wu YX.,...&Zhou HD.(2013).Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering.Tribology letters,49(1),47-59.
MLA	Chen JM,et al."Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering".Tribology letters 49.1(2013):47-59.