Correction of a digital micromirror device lithography system for fabrication of a pixelated liquid crystal micropolarizer array

doi:10.1364/oe.453800

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Correction of a digital micromirror device lithography system for fabrication of a pixelated liquid crystal micropolarizer array
	C. Liu; S. Y. Zhang; Y. Q. Liu; M. Y. Lu; W. H. Cao; L. Huang; H. Zhang; Z. F. Lu; Q. Q. Mu and H. Liu
刊名	Optics Express
	2022
卷号	30 期号:7 页码:12014-12025
ISSN号	1094-4087
DOI	10.1364/oe.453800
英文摘要	The combination of a digital micromirror device (DMD) lithography system and a rotatable polarizer provides a simple and convenient method to achieve the pixelated liquid crystal micropolarizer (LCMP) array for polarization imaging. In this paper, two crucial problems restricting the high-precision fabrication of LCMP array are pointed out and settled: the dislocation of LCMP pixels caused by parallelism error of the rotating polarizer and the grid defect caused by the gap between micromirrors. After correction, the maximum deviation of the fabricated LCMP pixels was reduced from 3.23 mu m to 0.11 mu m and the grid defect is eliminated. The correction method reported here lays a good foundation for the fine processing of liquid crystal devices with arbitrary photoalignment structure by using the DMD system. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66493]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C. Liu,S. Y. Zhang,Y. Q. Liu,et al. Correction of a digital micromirror device lithography system for fabrication of a pixelated liquid crystal micropolarizer array[J]. Optics Express,2022,30(7):12014-12025.
APA	C. Liu.,S. Y. Zhang.,Y. Q. Liu.,M. Y. Lu.,W. H. Cao.,...&Q. Q. Mu and H. Liu.(2022).Correction of a digital micromirror device lithography system for fabrication of a pixelated liquid crystal micropolarizer array.Optics Express,30(7),12014-12025.
MLA	C. Liu,et al."Correction of a digital micromirror device lithography system for fabrication of a pixelated liquid crystal micropolarizer array".Optics Express 30.7(2022):12014-12025.