Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror

doi:10.1038/s41377-022-00994-3

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror
	X. J. Zhang; H. X. Hu; X. K. Wang; X. Luo; G. Zhang; W. X. Zhao; X. Y. Wang; Z. Y. Liu; L. Xiong; E. H. Qi
刊名	Light-Science & Applications
	2022
卷号	11 期号:1 页码:13
ISSN号	2095-5545
DOI	10.1038/s41377-022-00994-3
英文摘要	In the process of manufacturing the world's largest silicon carbide (SiC) aspheric mirror, the primary difficulties are mirror blank preparation, asphere fabrication, and testing, as well as cladding and coating. Specifically, the challenges include the homogeneity of the complicated structure casting, accuracy and efficiency of the fabrication process, print-through effect, fidelity and precision of test procedure, stress and denseness of cladding process, the dynamic range of interferometric measurement, and air turbulence error due to the long optical path. To break through such a barrier of difficulties, we proposed the water-soluble room temperature vanishing mold and gel casting technology, homogeneous microstructure reaction-formed joint technology, nano-accuracy efficient compound fabrication, gravity unloading technology, high-denseness low-defect physical vapor deposition (PVD) Si-cladding technology, test data fusion method, and time-domain averaging method, etc. Based on the proposed technologies and methods, we have accomplished the world's largest SiC aspheric mirror with a size of empty set4.03 m. The impressive performance of the SiC aspheric mirror is validated by the characteristics of the fabricated SiC aspheric mirror. The aerial density of the SiC blank is less than 120 kg/m(2), surface shape test accuracy is better than 6 nm RMS, thickness inhomogeneity of the cladding layer is less than 5%, and the final surface figure error and roughness are 15.2 nm RMS and 0.8 nm RMS, respectively.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66462]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. J. Zhang,H. X. Hu,X. K. Wang,et al. Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror[J]. Light-Science & Applications,2022,11(1):13.
APA	X. J. Zhang.,H. X. Hu.,X. K. Wang.,X. Luo.,G. Zhang.,...&W. J. Deng and F. Zhang.(2022).Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror.Light-Science & Applications,11(1),13.
MLA	X. J. Zhang,et al."Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror".Light-Science & Applications 11.1(2022):13.