Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors

doi:10.1007/s12217-022-10017-w

	Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors
	Wang CY(王晨宇); Liu W(刘巍); Niu Y(牛宇); Sha, Wei 2; Luo ZR(罗子人)
刊名	MICROGRAVITY SCIENCE AND TECHNOLOGY ; 5
	2022-09
卷号	34 页码:98
关键词	Stress Metal coating Ellipsometry High precision
ISSN号	0938-0108
DOI	10.1007/s12217-022-10017-w
英文摘要	The residual stress information of the precision surface optical device with a metal coating plays an important role in precision optical manufacturing. However, the conventional optical-based non-contact approaches fail to measure the stress less than MPa for such devices, which is required for high precision gravitational waves detection. To solve this problem, we use ellipsometry to detect the stress of a gold coating reflection mirrors as the first trial. Under the pseudo-Brewster angle of the gold, the stress sensitivity for the ellipsometry amplitude psi reaches 35 kPa. The results suggest the traditional reflection ellipsometry responses at two specific orthogonal directions can be used to measure the strain-induced dielectric function tensor variations under a uniaxial stress situation. A preliminary microscopic model based on Drude model is proposed to derive the relationship between the dielectric function tensor variation of the coating and the uniaxial tensile strain s. Thus, the reflection ellipsometry can be used as an alternative method for the residual stress detection for the high precision planar optical devices with metal coatings under a uniaxial stress condition.
学科主题	Engineering, Aerospace ; Thermodynamics ; Mechanics
分类号	二类
语种	英语
WOS记录号	WOS:000859929700001
资助机构	National Key Research and Development Program of China [2020YFC2201300, 2021YFC2202902] ; Open Fund of State Key Laboratory of Applied Optics [SKLAO2020001A01] ; National Natural Science Foundation of China [81872584]
其他责任者	Niu, Y (corresponding author), Chinese Acad Sci, Ctr Gravitat Wave Expt, Inst Mech, Beijing 100190, Peoples R China.
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/90197]
专题	力学研究所_国家微重力实验室
作者单位	1.Chinese Acad Sci, Changchun Inst Opt, State Key Lab Appl Opt Fine Mech & Phys CIOMP, Changchun 130033, Peoples R China 2.Chinese Acad Sci, Ctr Gravitat Wave Expt, Inst Mech, Beijing 100190, Peoples R China 3.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China 4.Chinese Acad Sci, Inst Mech, Beijing Key Lab Engn Construct & Mechanobiol, NML, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Wang CY,Liu W,Niu Y,et al. Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors[J]. MICROGRAVITY SCIENCE AND TECHNOLOGY, 5,2022,34:98.
APA	王晨宇,刘巍,牛宇,Sha, Wei,&罗子人.(2022).Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors.MICROGRAVITY SCIENCE AND TECHNOLOGY,34,98.
MLA	王晨宇,et al."Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors".MICROGRAVITY SCIENCE AND TECHNOLOGY 34(2022):98.