Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating
	Wang C(王超); Wang TM(王廷梅); Wang QH(王齐华)
刊名	eXPRESS Polymer Letters
	2013
卷号	7 期号:8 页码:667-672
关键词	nanomaterials block copolymer dielectric constant nanoporous polyimide thin films
ISSN号	1788-618X
通讯作者	王齐华
英文摘要	In this paper, a new method to the preparation of low-dielectric nanoporous polyimide (PI) films was addressed, based on the self-assembly structures of PS-b-P4VP/poly(amic acid) (PAA, precursor of PI) blends. It is found the microphase-separation structure of PS-b-P4VP/PAA is a precondition of the formation of nanoporous structures, which could be achieved by solvent annealing. Nanoporous PI films with spherical pore size of ~11 nm were obtained by thermal imidization followed by the removal of the PS-b-P4VP block copolymer. The porosity of the nanoporous PI films could be controlled by the weight fraction of the PS-b-P4VP block copolymer. The dielectric properties of the nanoporous PI films were studied, and it was found that the introduction of nanopores could effectively reduce the dielectric constant from 3.60 of dense PI films to 2.41 of nanoporous PI films with a porosity of 26%, making it promising in microelectronic devices. The fabrication method described here could be extended to other polymer systems.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Science Foundation for Distinguished Young Scholars of China (Grant No.51025517);the National Defense Basic Scientific Research Project (A1320110011)
语种	英语
WOS记录号	WOS:000320029800003
公开日期	2013-12-03
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4372]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
作者单位	Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
推荐引用方式 GB/T 7714	Wang C,Wang TM,Wang QH. Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating[J]. eXPRESS Polymer Letters,2013,7(8):667-672.
APA	Wang C,Wang TM,&Wang QH.(2013).Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating.eXPRESS Polymer Letters,7(8),667-672.
MLA	Wang C,et al."Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating".eXPRESS Polymer Letters 7.8(2013):667-672.