Emerging material platforms for integrated microcavity photonics | |
Liu, Jin13; Bo, Fang11,12; Chang, Lin10; Dong, Chun-Hua9; Ou, Xin8; Regan, Blake7; Shen, Xiaoqin6; Song, Qinghai5; Yao, Baicheng4; Zhang, Wenfu3 | |
刊名 | SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY |
2022-10 | |
卷号 | 65期号:10 |
关键词 | microcavity integrated optics nonlinear optics |
ISSN号 | 1674-7348;1869-1927 |
DOI | 10.1007/s11433-022-1957-3 |
产权排序 | 11 |
英文摘要 | Many breakthroughs in technologies are closely associated with the deep understanding and development of new material platforms. As the main material used in microelectronics, Si also plays a leading role in the development of integrated photonics. The indirect bandgap, absence of chi((2)) nonlinearity and the parasitic nonlinear absorptions at the telecom band of Si imposed technological bottlenecks for further improving the performances and expanding the functionalities of Si microcavities in which the circulating light intensity is dramatically amplified. The past two decades have witnessed the burgeoning of the novel material platforms that are compatible with the complementary metal-oxide-semiconductor (COMS) process. In particular, the unprecedented optical properties of the emerging materials in the thin film form have resulted in revolutionary progress in microcavity photonics. In this review article, we summarize the recently developed material platforms for integrated photonics with the focus on chip-scale microcavity devices. The material characteristics, fabrication processes and device applications have been thoroughly discussed for the most widely used new material platforms. We also discuss open challenges and opportunities in microcavity photonics, such as heterogeneous integrated devices, and provide an outlook for the future development of integrated microcavities. |
语种 | 英语 |
出版者 | SCIENCE PRESS |
WOS记录号 | WOS:000850063100003 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/96144] |
专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
通讯作者 | Liu, Jin |
作者单位 | 1.Peking Univ, Frontiers Sci Ctr Nanooptoelect, Sch Phys, Beijing 100871, Peoples R China 2.Peking Univ, State Key Lab Mesoscop Phys, Sch Phys, Beijing 100871, Peoples R China 3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China 4.Univ Elect Sci & Technol China, Minist Educ, Key Lab Opt Fiber Sensing & Commun, Chengdu 611731, Peoples R China 5.Harbin Inst Technol, Minist Ind & Informat Technol, Key Lab Micronano Optoelect Informat Syst, Shenzhen 518055, Peoples R China 6.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China 7.Univ Technol Sydney, Sch Math & Phys Sci, Ultimo 2007, Australia 8.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China 9.Univ Sci & Technol China, CAS Key Lab Quantum Informat, Hefei 230026, Peoples R China 10.Peking Univ, Sch Elect, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100871, Peoples R China |
推荐引用方式 GB/T 7714 | Liu, Jin,Bo, Fang,Chang, Lin,et al. Emerging material platforms for integrated microcavity photonics[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2022,65(10). |
APA | Liu, Jin.,Bo, Fang.,Chang, Lin.,Dong, Chun-Hua.,Ou, Xin.,...&Xiao, Yun-Feng.(2022).Emerging material platforms for integrated microcavity photonics.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,65(10). |
MLA | Liu, Jin,et al."Emerging material platforms for integrated microcavity photonics".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 65.10(2022). |
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