Theoretical study of sub-wavelength gratings fabrication by TM0 mode interference in symmetric metal-cladding dielectric waveguide

doi:10.1007/s00340-022-07866-z

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	Theoretical study of sub-wavelength gratings fabrication by TM0 mode interference in symmetric metal-cladding dielectric waveguide
	Ren, Yaqian 1; Wang, Xiangxian 1; Di, Xiujuan 1; Chen, Zhenyu 1; Jia, Tianxu 1; Zhang, Liping 1; Yang, Hua 1; Qi, Yunping 2; Wen, Xiaolei 3
刊名	Applied Physics B: Lasers and Optics
	2022-08-01
卷号	128 期号:8
关键词	Cladding (coating) Fabrication Lithography Metals Dielectric structure Film layers Gratings fabrication Metal-films Mode interference Numerical results Resist thickness Sub-wave length grating Symmetrics Theoretical study
ISSN号	0946-2171
DOI	10.1007/s00340-022-07866-z
英文摘要	This study proposes a method to fabricate sub-wavelength gratings based on the TM0 mode in a symmetric metal-cladding dielectric waveguide. The TM0 mode is excited by 325 nm laser in a symmetric metal-cladding dielectric structure comprising of a resist sandwiched between two metal film layers. Numerical results show that a sub-wavelength grating with a half-period of 46 nm (approximately λ/ 7 ) can be obtained, and its period can be adjusted by changing the resist thickness. The lithography method of symmetric metal-cladding dielectric structure has various advantages over asymmetric ones, including smaller periods of sub-wavelength gratings, higher contrast, and larger exposure depth of resist. In addition, both positive and negative resists can be used to fabricate better sub-wavelength gratings in practical lithography applications. The proposed lithography method provides not only a theoretical reference for the fabrication of rich sub-wavelength gratings but also an approach for the development of near-field imaging and micro–nano lithography. © 2022, The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature.
WOS研究方向	Optics ; Physics
语种	英语
出版者	Springer Science and Business Media Deutschland GmbH
WOS记录号	WOS:000826164000001
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/159401]
专题	理学院
作者单位	1.School of Science, Lanzhou University of Technology, Lanzhou; 730050, China; 2.College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou; 730070, China; 3.Center for Micro- and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei; 230026, China
推荐引用方式 GB/T 7714	Ren, Yaqian,Wang, Xiangxian,Di, Xiujuan,et al. Theoretical study of sub-wavelength gratings fabrication by TM0 mode interference in symmetric metal-cladding dielectric waveguide[J]. Applied Physics B: Lasers and Optics,2022,128(8).
APA	Ren, Yaqian.,Wang, Xiangxian.,Di, Xiujuan.,Chen, Zhenyu.,Jia, Tianxu.,...&Wen, Xiaolei.(2022).Theoretical study of sub-wavelength gratings fabrication by TM0 mode interference in symmetric metal-cladding dielectric waveguide.Applied Physics B: Lasers and Optics,128(8).
MLA	Ren, Yaqian,et al."Theoretical study of sub-wavelength gratings fabrication by TM0 mode interference in symmetric metal-cladding dielectric waveguide".Applied Physics B: Lasers and Optics 128.8(2022).