Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

doi:10.1142/S0217984921504595

CORC > 兰州理工大学 > 兰州理工大学 > 理学院

	Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations
	Wang, Xiangxian 1; Jia, Tianxu 1; Zhu, Jiankai 1; Su, Yingwen 1; Zhang, Liping 1; Yang, Hua 1; Yi, Zao 2; Qi, Yunping 3
刊名	MODERN PHYSICS LETTERS B
	2021-11-20
卷号	35 期号:32
关键词	Laser interference lithography polarization periodic pattern
ISSN号	0217-9849
DOI	10.1142/S0217984921504595
英文摘要	In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.
WOS研究方向	Physics
语种	英语
出版者	WORLD SCIENTIFIC PUBL CO PTE LTD
WOS记录号	WOS:000713305600001
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/149968]
专题	理学院
作者单位	1.Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China; 2.Southwest Univ Sci & Technol, Joint Lab Extreme Condit Matter Properties, Mianyang 621010, Sichuan, Peoples R China; 3.Northwest Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China
推荐引用方式 GB/T 7714	Wang, Xiangxian,Jia, Tianxu,Zhu, Jiankai,et al. Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations[J]. MODERN PHYSICS LETTERS B,2021,35(32).
APA	Wang, Xiangxian.,Jia, Tianxu.,Zhu, Jiankai.,Su, Yingwen.,Zhang, Liping.,...&Qi, Yunping.(2021).Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations.MODERN PHYSICS LETTERS B,35(32).
MLA	Wang, Xiangxian,et al."Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations".MODERN PHYSICS LETTERS B 35.32(2021).