Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography

doi:10.3390/coatings11010062

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	Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
	Jia, Tianxu 1; Wang, Xiangxian 1; Ren, Yaqian 1; Su, Yingwen 1; Zhang, Liping 1; Yang, Hua 1; Qi, Yunping 2; Liu, Weiming 3
刊名	COATINGS
	2021-01
卷号	11 期号:1 页码:-
关键词	laser interference lithography microstructure incidence angle
DOI	10.3390/coatings11010062
英文摘要	This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transverse magnetic (TM) polarizations and various microstructures are simulated by controlling the high-reflectivity mirror group to adjust the incidence angle. This study indicates that the incidence angle has a considerable influence on the shape and period of the lattice, thereby contributing to the fabrication of microstructures with different arrangements. These structures include donut, circle, D-type, rectangular, triangular, U-type, and honeycomb lattices. The six-beam laser interference lithography technique is expected to benefit microstructure fabrication because of its simple operation, large writing area, and low cost, thereby promoting the development of micro-optics.
WOS研究方向	Materials Science ; Physics
语种	英语
出版者	MDPI
WOS记录号	WOS:000610025000001
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/147366]
专题	理学院
通讯作者	Wang, Xiangxian
作者单位	1.Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China; 2.Northwest Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China; 3.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China
推荐引用方式 GB/T 7714	Jia, Tianxu,Wang, Xiangxian,Ren, Yaqian,et al. Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography[J]. COATINGS,2021,11(1):-.
APA	Jia, Tianxu.,Wang, Xiangxian.,Ren, Yaqian.,Su, Yingwen.,Zhang, Liping.,...&Liu, Weiming.(2021).Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography.COATINGS,11(1),-.
MLA	Jia, Tianxu,et al."Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography".COATINGS 11.1(2021):-.