Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target

doi:10.1088/2053-1591/aa9ae6

CORC > 兰州理工大学 > 兰州理工大学 > 理学院

	Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target; Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target
	Jiang, Jinlong 1,2,3; He, Kaichen 2; He, XingXing 2; Huang, Hao 2; Pang, Xianjuan 3; Wei, Zhiqiang 2
刊名	MATERIALS RESEARCH EXPRESS ; MATERIALS RESEARCH EXPRESS
	2017-12 ; 2017-12
卷号	4 期号:12
关键词	TiSiC film TiSiC film magnetron sputtering magnetron sputtering microstructure microstructure mechanical properties mechanical properties tribology tribology
ISSN号	2053-1591 ; 2053-1591
DOI	10.1088/2053-1591/aa9ae6 ; 10.1088/2053-1591/aa9ae6
英文摘要	In this work, the TiSiC films were deposited by magnetron sputtering segment target with various areal ratio of Ti80Si20 to C. The effects of segment target component on the structure, mechanical and tribological properties of the films were investigated. The results revealed that the deposited films exhibited a structural transform from a cubic TiC structure to a nanocomposite structure with nanocrystalline TiC in a-C:Si matrix, and finally x-ray amorphous structures with decreasing areal ratio of Ti80Si20 to C. The TiSiC film deposited at the Ti80Si20:C areal ratio of 7:7 showed superior mechanical and tribological properties such as high hardness (18.6 Gpa), good scratch resistant (46 N), low friction coefficient (0.2) and low wear rate (8.6 x 10(-7) mm(3) Nm(-1)), which suggests that it is a promising candidate for the protective films.; In this work, the TiSiC films were deposited by magnetron sputtering segment target with various areal ratio of Ti80Si20 to C. The effects of segment target component on the structure, mechanical and tribological properties of the films were investigated. The results revealed that the deposited films exhibited a structural transform from a cubic TiC structure to a nanocomposite structure with nanocrystalline TiC in a-C:Si matrix, and finally x-ray amorphous structures with decreasing areal ratio of Ti80Si20 to C. The TiSiC film deposited at the Ti80Si20:C areal ratio of 7:7 showed superior mechanical and tribological properties such as high hardness (18.6 Gpa), good scratch resistant (46 N), low friction coefficient (0.2) and low wear rate (8.6 x 10(-7) mm(3) Nm(-1)), which suggests that it is a promising candidate for the protective films.
资助项目	Open Fund Project of National United Engineering Laboratory for Advanced Bearing Tribology[201706]
WOS研究方向	Materials Science ; Materials Science
语种	英语 ; 英语
出版者	IOP PUBLISHING LTD ; IOP PUBLISHING LTD
WOS记录号	WOS:000417566400001 ; WOS:000417566400001
状态	已发表
内容类型	期刊论文
源URL	[http://119.78.100.223/handle/2XXMBERH/32999]
专题	理学院省部共建有色金属先进加工与再利用国家重点实验室
通讯作者	Jiang, Jinlong
作者单位	1.Lanzhou Univ Technol, State Key Lab Adv Proc & Recycling Nonferrous Met, Lanzhou 730050, Gansu, Peoples R China 2.Lanzhou Univ Technol, Dept Phys, Sch Sci, Lanzhou 730050, Gansu, Peoples R China 3.Henan Univ Sci & Technol, Natl United Engn Lab Adv Rearing Tribol, Luoyang 471003, Henan, Peoples R China
推荐引用方式 GB/T 7714	Jiang, Jinlong,He, Kaichen,He, XingXing,et al. Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target, Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target[J]. MATERIALS RESEARCH EXPRESS, MATERIALS RESEARCH EXPRESS,2017, 2017,4, 4(12).
APA	Jiang, Jinlong,He, Kaichen,He, XingXing,Huang, Hao,Pang, Xianjuan,&Wei, Zhiqiang.(2017).Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target.MATERIALS RESEARCH EXPRESS,4(12).
MLA	Jiang, Jinlong,et al."Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target".MATERIALS RESEARCH EXPRESS 4.12(2017).