Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference

doi:10.1016/j.rinp.2019.102460

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	Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference
	Tong, Huan; Xu, Yueqi; Su, Yingwen; Wang, Xiangxian
刊名	RESULTS IN PHYSICS
	2019-09
卷号	14
关键词	Elliptical subwavelength nanohole arrays Lithography Waveguide mode interference Asymmetric metal-cladding dielectric waveguide
ISSN号	2211-3797
DOI	10.1016/j.rinp.2019.102460
英文摘要	A theoretical method is proposed for fabricating elliptical subwavelength nanohole arrays (ESNA) based on the higher-order waveguide mode (WM) interference in an asymmetric metal-cladding dielectric waveguide (AMDW). The finite-element method is used to simulate the optical field distributions in the AMDW. With excitation by 442-nm transverse magnetic (TM) polarized light, the metal layer is a 40-nm-thick silver film and the waveguide layer is a 9650-nm-thick photoresist that can support many guided modes by virtue of its thickness. The interference of TM51 WMs is used to demonstrate the proposed method for fabricating ESNA. The major and minor axes of the nanohole are obtained theoretically as 110 nm and 98 nm, respectively. With a certain photoresist thickness, ESNA with various periods can be fabricated by selecting different guided modes. The proposed method is a simple way to produce ESNA and could have wide applications in the field of nano-optics.
资助项目	National Natural Science Foundation of China[61865008] ; Undergraduate Innovation Training Program of GanSu province[DC2019262]
WOS研究方向	Materials Science ; Physics
语种	英语
出版者	ELSEVIER
WOS记录号	WOS:000485104100149
状态	已发表
内容类型	期刊论文
源URL	[http://119.78.100.223/handle/2XXMBERH/31589]
专题	理学院
通讯作者	Wang, Xiangxian
作者单位	Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Gansu, Peoples R China
推荐引用方式 GB/T 7714	Tong, Huan,Xu, Yueqi,Su, Yingwen,et al. Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference[J]. RESULTS IN PHYSICS,2019,14.
APA	Tong, Huan,Xu, Yueqi,Su, Yingwen,&Wang, Xiangxian.(2019).Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference.RESULTS IN PHYSICS,14.
MLA	Tong, Huan,et al."Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference".RESULTS IN PHYSICS 14(2019).