Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining

doi:10.1016/j.colsurfa.2022.129161

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	Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining
	Song, Xiaozong 1; Niu, Yanjiang 1; Gao, Gui 2
刊名	Colloids and Surfaces A: Physicochemical and Engineering Aspects
	2022-09-05
卷号	648
关键词	Atoms Landforms Polishing Silicon Spectral density Surface roughness TiO2 nanoparticles Creation process Jet machining Material removal Nanoparticle colloids Surface creation Surface microtopography Ultra smooth surface Ultra-smooth surface creation Ultraviolet-induced nanoparticle colloid jet machining Workpiece
ISSN号	0927-7757
DOI	10.1016/j.colsurfa.2022.129161
英文摘要	Ultraviolet-induced nanoparticle colloid jet machining is a damage-free ultra-smooth surface polishing technology, which can realize atomic level material removal by utilizing the interface reaction between workpiece surface and nanoparticles in colloid jet beam under the catalysis of ultraviolet (UV) light. Due to the difference of chemical activity of atoms at different microstructures ("plane", "peak" and "valley" structure), the interfacial reaction degree between these atoms and nanoparticles in colloidal environment and the difficulty to remove those surface atoms are also different. To investigate the effects of surface microtopography on material removal and ultra-smooth surface creation processes in UV-induced nanoparticle colloid jet machining, first principle simulations of the interfacial reaction between the TiO2 nanoparticle and Si "plane", "peak" and "valley" structures have been done. Adsorption experiments and ultra-smooth surface polishing experiments were carried out to verify the rationality of the simulation results. The results indicate that the interface reaction between the "peak" structure and TiO2 nanoparticle is the most likely to occur, and the "valley" structure is the most difficult to occur. After the TiO2 nanoparticle being chemically bonded on the Si surface, the atoms on the "peak" structure are the easiest to be removed, and that of the "valley" structure are the most difficult to be removed. An ultra-smooth Si workpiece with surface roughness of Sq 0.49 nm has been obtained by UV-induced nanoparticle colloid jet machining. The power spectral density (PSD) results show that the Si workpiece has been gradually changed from a progressive surface to a fine surface, and has been smoothed in the wavelength range of 0.25–10 µm. © 2022 Elsevier B.V.
WOS研究方向	Chemistry
语种	英语
出版者	Elsevier B.V.
WOS记录号	WOS:000804119500001
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/158408]
专题	机电工程学院
作者单位	1.School of Mechanical and Electronical Engineering, Lanzhou University of Technology, Lanzhou; 730050, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou; 730000, China
推荐引用方式 GB/T 7714	Song, Xiaozong,Niu, Yanjiang,Gao, Gui. Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects,2022,648.
APA	Song, Xiaozong,Niu, Yanjiang,&Gao, Gui.(2022).Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining.Colloids and Surfaces A: Physicochemical and Engineering Aspects,648.
MLA	Song, Xiaozong,et al."Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining".Colloids and Surfaces A: Physicochemical and Engineering Aspects 648(2022).