Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes

doi:10.1364/OE.410100

	Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
	Zhang, Jingwen 1,2,3,4; Li, Zhiwei 3; Shao, Junming 3; Liu, Dun 3; Fan, Bin 3; Li, Bincheng 4
刊名	Optics Express
	2020-10-26
卷号	28 期号:22 页码:33739-33746
关键词	Electrodes Electron temperature EtchingElectron number densities Etching depth Etching uniformity Irregular sample Irregular shape Large aperture Plasma characteristics Plasma discharge
ISSN号	1094-4087
DOI	10.1364/OE.410100
英文摘要	The etching uniformity of diffractive membrane optical elements with an irregular shape was investigated. A deteriorative uniformity of electron number density and electron temperature was found according to finite element analysis of plasma discharge. A designable equivalent electrode was proposed to weaken the influence of introducing the unconventional, irregular sample. Improved uniformity of etching depths was demonstrated experimentally, assisting by the designable equivalent electrode. The demonstration of the designable equivalent electrode provides a beneficial solution for the fabrication of unconventional optical elements and an effective means for adjusting and controlling plasma characteristics. © 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
WOS研究方向	Optics
语种	英语
出版者	OSA - The Optical Society
WOS记录号	WOS:000582499400119
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/132383]
专题	能源与动力工程学院
作者单位	1.University of Chinese Academy of Sciences, Beijing; 100049, China; 2.College of Energy and Power Engineering, Lanzhou University of Technology, Lanzhou; 730050, China 3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 4.School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu; 610054, China;
推荐引用方式 GB/T 7714	Zhang, Jingwen,Li, Zhiwei,Shao, Junming,et al. Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes[J]. Optics Express,2020,28(22):33739-33746.
APA	Zhang, Jingwen,Li, Zhiwei,Shao, Junming,Liu, Dun,Fan, Bin,&Li, Bincheng.(2020).Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes.Optics Express,28(22),33739-33746.
MLA	Zhang, Jingwen,et al."Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes".Optics Express 28.22(2020):33739-33746.