Structure and tribological properties of MoS2/DLC multilayer films with different modulation periods

doi:10.16078/j.tribology.2017.01.005

	Structure and tribological properties of MoS2/DLC multilayer films with different modulation periods
	He, Tengfei 1,2; Wu, Youzhi 1; Xu, Jiao 2; Mu, Bo 3; Chai, Liqiang 2; Zhang, Xiaoqin 1,2; Wang, Peng 2
刊名	Mocaxue Xuebao/Tribology
	2017
卷号	37 期号:1 页码:35-43
关键词	Carbon films Friction Hardness Layered semiconductors Magnetron sputtering Mechanical properties Microstructure Modulation Molybdenum compounds Morphology Multilayers Scanning electron microscopy Silicon wafers Structural properties Transmission electron microscopy Tribology Ball-on-disk friction tester Frction property Lubricating properties Microstructure and mechanical properties Modulation period Radio-frequency magnetron sputtering system Tribological properties X ray diffractometers
ISSN号	10040595
DOI	10.16078/j.tribology.2017.01.005
英文摘要	A series of MoS2/diamond-like carbon (DLC) multilayer films with three different modulation periods (i.e. Λ of 54 nm, 30 nm and 18 nm) were deposited on silicon wafers (100) using a multi-target radio frequency magnetron sputtering system. The influence of modulation periods on the morphology, microstructure and mechanical properties of multilayer films were investigated with scanning electron microscope, Raman spectrometer, X-ray diffractometer, transmission electron microscope and nanoindentation. The lubricating properties of the films were investigated by the ball-on-disk friction tester in ambient atmosphere. Results show that the alternative deposition MoS2/DLC multilayer films effectively suppressed the growth of columnar structure in sputtered MoS2 and thus the produced films had compact structure. The hardness of multilayer films increased as the modulation period increased. Transmission analysis of cross-sectioned multilayer films revealed that the interface between layer was not smooth whereas the periodic structure was dense and well-defined. In addition, the thickness of modulation period was basically consistent with the initial set value. Compared with pure MoS2 film, the multilayer film with modulation period of 54 nm had better loadbearing capacity and elastic recovery capacity, and the corresponding hardness reached the highest value (7.15 GPa). Furthermore, the film exhibited the lowest friction coefficient (0.09) and wear rate of 1.34×10-7 mm3/(N·m) under a normal load of 5 N in ambient atmosphere (with relative humidity of about 30%). © 2017, Science Press. All right reserved.
语种	中文
出版者	Science Press
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/114573]
专题	材料科学与工程学院石油化工学院
作者单位	1.State Key Laboratory of Advanced Processing and Recycling of Non-ferrous Metals, School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou; Gansu; 730050, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou; Gansu; 730000, China; 3.College of Petrochemical Technology, Lanzhou University of Technology, Lanzhou; Gansu; 730050, China
推荐引用方式 GB/T 7714	He, Tengfei,Wu, Youzhi,Xu, Jiao,et al. Structure and tribological properties of MoS2/DLC multilayer films with different modulation periods[J]. Mocaxue Xuebao/Tribology,2017,37(1):35-43.
APA	He, Tengfei.,Wu, Youzhi.,Xu, Jiao.,Mu, Bo.,Chai, Liqiang.,...&Wang, Peng.(2017).Structure and tribological properties of MoS2/DLC multilayer films with different modulation periods.Mocaxue Xuebao/Tribology,37(1),35-43.
MLA	He, Tengfei,et al."Structure and tribological properties of MoS2/DLC multilayer films with different modulation periods".Mocaxue Xuebao/Tribology 37.1(2017):35-43.