Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs

doi:10.1002/sia.7106

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	Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs
	Wen, Xinyu 1,2; Lai, Zhenguo 1,3; Zhang, Bin 1; Wang, Xin 4; Wang, Yuan Yuan 5; Gao, Kaixiong 1; Tao, Caihong 2
刊名	Surface and Interface Analysis
	2022
卷号	54 期号:9 页码:933-943
关键词	Amorphous carbon Amorphous films Carbon films Film preparation Flow rate Hydrogenation Methanation Methane Nanostructures Tribology Atmospheric environment DLC/DLC pair Friction pair Graphite target Hydrogenated amorphous carbon films Hydrogenated carbon Hydrogenated carbon ball Magnetron-sputtering Methane flow Tribological properties
ISSN号	0142-2421
DOI	10.1002/sia.7106
英文摘要	In this study, we prepared a-C:H films with different nanostructures at different methane flow rates. The effect of the methane flow rate on the tribological properties of 440 steel/a-C:H friction pairs and a-C:H:Ti/a-C:H friction pairs in an atmospheric environment was studied by a reciprocating friction machine. The results show that there is no relationship between the tribological properties of 440 steel/a-C:H friction pair and methane flow rate. The tribological performance of the a-C:H:Ti/a-C:H friction pair was greatly improved. In particular, in the friction pair of a-C:H:Ti/a-C:H with a methane flow rate of 20 sccm, superlubricity is shown, and the wear rate is only 4.04 × 10−9 mm3/Nm. After tribological experiments, Raman spectroscopy, XPS, and other characterization methods were used to study the relationship between the nanostructure and tribological properties of a-C:H:Ti films and a-C:H prepared with different methane flow rates. This study is great significance to the application of a-C:H:Ti/a-C:H friction pair in mechanical parts under atmospheric environment. © 2022 John Wiley & Sons Ltd.
语种	英语
出版者	John Wiley and Sons Ltd
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/159121]
专题	兰州理工大学
作者单位	1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, China; 2.School of Chemistry and Chemical Engineering, Lanzhou Jiaotong University, Lanzhou, China; 3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China; 4.AECC Beijing Institute of Aeronautical Materials, Beijing, China; 5.College of Petrochemical Technology, Lanzhou University of Technology, Lanzhou, China
推荐引用方式 GB/T 7714	Wen, Xinyu,Lai, Zhenguo,Zhang, Bin,et al. Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs[J]. Surface and Interface Analysis,2022,54(9):933-943.
APA	Wen, Xinyu.,Lai, Zhenguo.,Zhang, Bin.,Wang, Xin.,Wang, Yuan Yuan.,...&Tao, Caihong.(2022).Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs.Surface and Interface Analysis,54(9),933-943.
MLA	Wen, Xinyu,et al."Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs".Surface and Interface Analysis 54.9(2022):933-943.