Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices

doi:10.1016/j.compositesb.2022.110170

CORC > 金属研究所 > 中国科学院金属研究所

	Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices
	Liang, Fei 2,3; Wang, Zhe-Xuan 1; Zhang, Bin 1; Luo, Xue-Mei 3; Zhang, Guang-Ping 3
刊名	COMPOSITES PART B-ENGINEERING
	2022-08-15
卷号	243 页码:12
关键词	MEMS Laminated nanocomposites Strength Interface Ni-W alloy High temperature
ISSN号	1359-8368
DOI	10.1016/j.compositesb.2022.110170
通讯作者	Zhang, Bin(zhangb@atm.neu.edu.cn) ; Zhang, Guang-Ping(gpzhang@imr.ac.cn)
英文摘要	The application of LIGA Ni and nanocrystalline binary Ni-X(X = W, Mo, Fe) alloys in the micro-electromechanical systems is severely limited due to their strength and ductility trade-off at elevated temperatures. Aiming at such a problem, here we designed Ni/Ni-W laminated nanocomposites with heterogeneous interfaces, and investigated their mechanical behavior at 400 degrees C. We found that the strength of the laminated nanocomposites with different thickness ratios of Ni layers to Ni-W layers at 400 degrees C could reach 400-620 MPa, being two to three times larger than that of traditional LIGA Ni, and their elongation to failure is above or equal to 10%. Introduced heterogeneous interfaces greatly improved the high-temperature tensile properties through the transition of the grain growth direction in the Ni layers from deposition direction to the loading direction and the geometrically constrained premature failure of relaxed Ni-W layers. These findings can offer a potential opportunity to apply the heterogeneous nanocomposites in the field of high-temperature micro-electro-mechanical system devices.
资助项目	National Natural Science Foundation of China (NSFC)[51971060] ; National Natural Science Foundation of China (NSFC)[52171128] ; Fundamental Research Project of Shenyang National Laboratory for Materials Science[L2019R18]
WOS研究方向	Engineering ; Materials Science
语种	英语
出版者	ELSEVIER SCI LTD
WOS记录号	WOS:000841239200001
资助机构	National Natural Science Foundation of China (NSFC) ; Fundamental Research Project of Shenyang National Laboratory for Materials Science
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/174509]
专题	金属研究所_中国科学院金属研究所
通讯作者	Zhang, Bin; Zhang, Guang-Ping
作者单位	1.Northeastern Univ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Minist Educ, 3-11 Wenhua Rd, Shenyang 110819, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Liang, Fei,Wang, Zhe-Xuan,Zhang, Bin,et al. Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices[J]. COMPOSITES PART B-ENGINEERING,2022,243:12.
APA	Liang, Fei,Wang, Zhe-Xuan,Zhang, Bin,Luo, Xue-Mei,&Zhang, Guang-Ping.(2022).Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices.COMPOSITES PART B-ENGINEERING,243,12.
MLA	Liang, Fei,et al."Heterogeneous interface-enhanced strength of Ni/Ni-W laminated nanocomposites for high-temperature MEMS devices".COMPOSITES PART B-ENGINEERING 243(2022):12.