Ripple surface generated on hydrogenated amorphous carbon nitride films

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	Ripple surface generated on hydrogenated amorphous carbon nitride films
	Zhang JY(张俊彦); Yang SR(杨生荣)
刊名	Applied Surface Science
	2007
卷号	253 页码:4099-4102
关键词	Carbon nitride films Ripple morphology
ISSN号	0169-4332
通讯作者	张俊彦
中文摘要	It is reported for the first time that the periodical ripple surface feature at micrometer-scale was observed on hydrogenated amorphous carbon nitride films deposited by pulse plasma chemical vapor deposition (CVD) technique. Nitrogen incorporation to hydrogenated amorphous carbon films and the different growing environments of pulse dc plasma discharge perhaps played crucial role in the surface morphology transformation of hydrogenated amorphous carbon nitride films.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Science Foundation of China (Grant nos. 50572108;50323007);the “Hundreds Talent Program” of Chinese Academy of Sciences
语种	英语
WOS记录号	WOS:000244656600061
公开日期	2013-11-01
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4101]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Zhang JY(张俊彦)
推荐引用方式 GB/T 7714	Zhang JY,Yang SR. Ripple surface generated on hydrogenated amorphous carbon nitride films[J]. Applied Surface Science,2007,253:4099-4102.
APA	张俊彦,&杨生荣.(2007).Ripple surface generated on hydrogenated amorphous carbon nitride films.Applied Surface Science,253,4099-4102.
MLA	张俊彦,et al."Ripple surface generated on hydrogenated amorphous carbon nitride films".Applied Surface Science 253(2007):4099-4102.