A novel method for fabricating micro-dimple arrays with good surface quality on metallic glass substrate by combining laser irradiation and mechanical polishing under wax sealing

doi:10.1016/j.jmapro.2022.05.032

CORC > 力学研究所 > 中国科学院力学研究所 > 非线性力学国家重点实验室

	A novel method for fabricating micro-dimple arrays with good surface quality on metallic glass substrate by combining laser irradiation and mechanical polishing under wax sealing
	Huang, Hu 4; Qian, Yongfeng 4; Zhang, Lin 3; Jiang, Minqiang 1,2; Yan, Jiwang 3
刊名	JOURNAL OF MANUFACTURING PROCESSES
	2022-07-01
卷号	79 页码:911-923
关键词	Metallic glass Laser irradiation Mechanical polishing micro-dimple array Surface quality micro nano-manufacturing
ISSN号	1526-6125
DOI	10.1016/j.jmapro.2022.05.032
通讯作者	Zhang, Lin(zhanglin@keio.jp)
英文摘要	Surface micro-patterning is an emerging technique to endow a wide range of materials with specific functions, such as superhydrophobicity and anti-reflection, but it is still technically challenging and inordinately expensive via existing manufacturing approaches. Compared with crystalline metals, metallic glasses (MGs) are talented with some unique mechanical and chemical properties due to their isotropic internal structure. Here, a novel two-step method, involving nanosecond pulsed laser irradiation and mechanical polishing, was proposed to fabricate micro-dimple arrays with good surface quality on the MG substrate. In the first step, multi-pulse laser irradiation experiments were performed to study the correlation between the peak laser power intensity and the feature sizes of the micro-dimple (i.e. the depth and diameter of the micro-dimple as well as the height of the pile-up), and then various micro-dimple arrays were fabricated on the MG substrate by adjusting the peak laser power intensity and the interval between adjacent laser shots. Subsequently, aiming at improving the surface quality, the micro-dimple arrays were mechanically polished under wax sealing. The experimental results indicated that after polishing, the pile-ups around the micro-dimples were completely removed, and at the same time, the surface quality of their inner walls was improved. Furthermore, based on experimental results, the possible material removal mechanism during polishing was discussed. This study provides a convenient method to fabricate micro-dimple arrays with good surface quality on the MG substrate, which would be one of the potential alternatives for large-area, low-cost micro/nano-manufacturing.
资助项目	National Natural Science Foundation of China[51705197] ; Young Elite Scientists Sponsorship Program by CAST (YESS)[2017QNRC001] ; Graduate Innovation Fund of Jilin University[101832020CX106] ; Opening Project of the Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University[202104] ; Fundamental Research Funds for the Central Universities
WOS关键词	ABLATION ; SCIENCE ; ALLOYS
WOS研究方向	Engineering
语种	英语
WOS记录号	WOS:000809630800003
资助机构	National Natural Science Foundation of China ; Young Elite Scientists Sponsorship Program by CAST (YESS) ; Graduate Innovation Fund of Jilin University ; Opening Project of the Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University ; Fundamental Research Funds for the Central Universities
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/89739]
专题	力学研究所_非线性力学国家重点实验室
通讯作者	Zhang, Lin
作者单位	1.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China 3.Keio Univ, Fac Sci & Technol, Dept Mech Engn, Yokohama 2238522, Japan 4.Jilin Univ, Sch Mech & Aerosp Engn, Key Lab CNC Equipment Reliabil, Minist Educ, Changchun 130022, Jilin, Peoples R China
推荐引用方式 GB/T 7714	Huang, Hu,Qian, Yongfeng,Zhang, Lin,et al. A novel method for fabricating micro-dimple arrays with good surface quality on metallic glass substrate by combining laser irradiation and mechanical polishing under wax sealing[J]. JOURNAL OF MANUFACTURING PROCESSES,2022,79:911-923.
APA	Huang, Hu,Qian, Yongfeng,Zhang, Lin,Jiang, Minqiang,&Yan, Jiwang.(2022).A novel method for fabricating micro-dimple arrays with good surface quality on metallic glass substrate by combining laser irradiation and mechanical polishing under wax sealing.JOURNAL OF MANUFACTURING PROCESSES,79,911-923.
MLA	Huang, Hu,et al."A novel method for fabricating micro-dimple arrays with good surface quality on metallic glass substrate by combining laser irradiation and mechanical polishing under wax sealing".JOURNAL OF MANUFACTURING PROCESSES 79(2022):911-923.