Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements

doi:10.3390/app11156897

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	Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements
	Y. Y. Bai; Z. Y. Zhang; R. Q. Wang; T. B. Chen; X. Wang and X. J. Zhang
刊名	Applied Sciences-Basel
	2021
卷号	11 期号:15 页码:12
DOI	10.3390/app11156897
英文摘要	Computer-generated hologram (CGH) null correctors are used as accuracy standards for interferometric measurements of optical surfaces and optical systems. Diffractive optics calibrators (DOCs) have been developed to evaluate the phase tolerance of CGHs based on scalar approximation by measuring variations in duty cycle and etching depth. However, if the grating period of a CGH < 5 lambda, the scalar approximation is not accurate for phase analysis and reconstruction. In this study, the measurement errors of DOCs with small-period CGHs were investigated and experimentally verified. Results show that the imperfections of scalar approximation in CGHs cannot be ignored and the development of rigorous evaluation methods to improve the measurement accuracy of CGHs is of great practical significance.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65323]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Y. Bai,Z. Y. Zhang,R. Q. Wang,et al. Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements[J]. Applied Sciences-Basel,2021,11(15):12.
APA	Y. Y. Bai,Z. Y. Zhang,R. Q. Wang,T. B. Chen,&X. Wang and X. J. Zhang.(2021).Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements.Applied Sciences-Basel,11(15),12.
MLA	Y. Y. Bai,et al."Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements".Applied Sciences-Basel 11.15(2021):12.