Extraction algorithm for longitudinal and transverse mechanical information of AFM | |
Hao, Chunxue1,2,3; Wang SJ(王守金)3; Yuan S(袁帅); (1,2); Wu Boyu1,2,3; Yu P(于鹏)1,2; Shi JL(施佳林)1,2 | |
刊名 | Nanotechnology and Precision Engineering |
2022 | |
卷号 | 5期号:2页码:1-11 |
关键词 | Atomic force microscope Peak force tapping Torsional resonance Mechanical characteristic measurement Background subtraction algorithm Coupled mechanical model |
ISSN号 | 1672-6030 |
产权排序 | 1 |
英文摘要 | The atomic force microscope (AFM) can measure nanoscale morphology and mechanical properties and has a wide range of applications. The traditional method for measuring the mechanical properties of a sample does so for the longitudinal and transverse properties separately, ignoring the coupling between them. In this paper, a data processing and multidimensional mechanical information extraction algorithm for the composite mode of peak force tapping and torsional resonance is proposed. On the basis of a tip-sample interaction model for the AFM, longitudinal peak force data are used to decouple amplitude and phase data of transverse torsional resonance, accurately identify the tip-sample longitudinal contact force in each peak force cycle, and synchronously obtain the corresponding characteristic images of the transverse amplitude and phase. Experimental results show that the measured longitudinal mechanical characteristics are consistent with the transverse amplitude and phase characteristics, which verifies the effectiveness of the method. Thus, a new method is provided for the measurement of multidimensional mechanical characteristics using the AFM. © 2022 Author(s). |
语种 | 英语 |
资助机构 | General Program of the National Natural Science Foundation of China (62073227) ; National Natural Science Foundation of China (61927805 and 61903359) |
内容类型 | 期刊论文 |
源URL | [http://ir.sia.cn/handle/173321/31020] |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Wang SJ(王守金); Shi JL(施佳林) |
作者单位 | 1.Institute of Robotics and Intelligent Manufacturing Innovation, Chinese Academy of Sciences, Shenyang 110169, China 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 3.School of Information and Control Engineering, Shenyang Jianzhu University, Shenyang 110168, China |
推荐引用方式 GB/T 7714 | Hao, Chunxue,Wang SJ,Yuan S,et al. Extraction algorithm for longitudinal and transverse mechanical information of AFM[J]. Nanotechnology and Precision Engineering,2022,5(2):1-11. |
APA | Hao, Chunxue.,Wang SJ.,Yuan S.,.,Wu Boyu.,...&Shi JL.(2022).Extraction algorithm for longitudinal and transverse mechanical information of AFM.Nanotechnology and Precision Engineering,5(2),1-11. |
MLA | Hao, Chunxue,et al."Extraction algorithm for longitudinal and transverse mechanical information of AFM".Nanotechnology and Precision Engineering 5.2(2022):1-11. |
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