KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (111), (110) and (100) planes

Shao, Jingzhen1,2; Liang, Xu1,2; Lin, Ying1,2; Wang, Shimao1,2; Deng, Zanhong1,2; Meng, Gang1,2; Fang, Xiaodong1,3
刊名APPLIED SURFACE SCIENCE
2022-06-01
卷号586
关键词Excimer lasers Laser damage Calcium fluoride Crystal structures
ISSN号0169-4332
DOI10.1016/j.apsusc.2022.152716
通讯作者Liang, Xu(liangxu@aiofm.ac.cn) ; Fang, Xiaodong(xdfang@aiofm.ac.cn)
英文摘要CaF2 crystal generally has a fluorite-type crystal structure, in which the cleavage plane is {111} and the slip system is {1 0 0} (1 1 0). The mechanical properties of different crystal planes are obviously different. In this investigation, 248 nm KrF excimer laser damage experiments were carried out on three different crystal planes (100), (110) and (111) of CaF2 crystals. The laser induced damage threshold was obtained, and the relationship between crystal plane and damage characteristics was analyzed. Our work highlights were that by analyzing the relationship among crystal plane, cleavage plane and slip plane, the formation mechanism of surface morphology of (111), (110) and (100) crystal planes were summarized.
资助项目Scientific Equipment Development Project of the Chinese Academy of Sciences[YJKYYQ20210007] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences[2018481] ; National Natural Science Foundation of China[62075223] ; Open Research Fund of the State Key Laboratory of Pulsed Power Laser Technology[SKL2017KF05]
WOS关键词FLUORIDE
WOS研究方向Chemistry ; Materials Science ; Physics
语种英语
出版者ELSEVIER
WOS记录号WOS:000776115500004
资助机构Scientific Equipment Development Project of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; National Natural Science Foundation of China ; Open Research Fund of the State Key Laboratory of Pulsed Power Laser Technology
内容类型期刊论文
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/128509]  
专题中国科学院合肥物质科学研究院
通讯作者Liang, Xu; Fang, Xiaodong
作者单位1.Chinese Acad Sci, Anhui Prov Key Lab Photon Devices & Mat, Anhui Inst Opt & Fine Mech, Hefei Inst Phys Sci, Hefei 230031, Peoples R China
2.Adv Laser Technol Lab Anhui Prov, Hefei 230037, Peoples R China
3.Shenzhen Technol Univ, Coll New Mat & New Energies, Shenzhen 518118, Peoples R China
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Shao, Jingzhen,Liang, Xu,Lin, Ying,et al.

KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (111), (110) and (100) planes

[J]. APPLIED SURFACE SCIENCE,2022,586.
APA Shao, Jingzhen.,Liang, Xu.,Lin, Ying.,Wang, Shimao.,Deng, Zanhong.,...&Fang, Xiaodong.(2022).

KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (111), (110) and (100) planes

.APPLIED SURFACE SCIENCE,586.
MLA Shao, Jingzhen,et al."

KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (111), (110) and (100) planes

".APPLIED SURFACE SCIENCE 586(2022).
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