Overview of 2D grating displacement measurement technology

doi:10.37188/CO.2020-0237

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Overview of 2D grating displacement measurement technology
	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao
刊名	Chinese Optics
	2020
卷号	13 期号:6 页码:1224-1238
ISSN号	20951531
DOI	10.37188/CO.2020-0237
英文摘要	Ultra-precision displacement measurement technology is not only the basis of precision machining, but also plays a decisive role in the chip manufacturing industry that is rapidly developing in Moore's Law. The grating displacement measurement system based on the grating pitch is widely used in multidimensional measurement system. Compared with the laser displacement measurement system, grating displacement measurement system greatly reduces the environmental requirements for humidity, temperature and pressure. In this paper, the development status of the optical structure of displacement sensing system based on two-dimensional grating in recent years is introduced. The principles of zero-difference and heterodyne grating interferometrys are introduced. The optical structure based on single-block two-dimensional grating is reviewed. The development history of the optical structure in single-block two-dimensional grating to coupling designs of multi-block two-dimensional gratings is summarized, the advantages and disadvantages of several two-dimensional grating displacement measurement systems are compared and analyzed, and the development trend of two-dimensional grating displacement measurement system is prospected. The engineering process of two-dimensional grating displacement measurement system is summarized. Copyright 2020 Chinese Optics. All rights reserved.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64775]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao. Overview of 2D grating displacement measurement technology[J]. Chinese Optics,2020,13(6):1224-1238.
APA	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao.(2020).Overview of 2D grating displacement measurement technology.Chinese Optics,13(6),1224-1238.
MLA	Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao."Overview of 2D grating displacement measurement technology".Chinese Optics 13.6(2020):1224-1238.