Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing

doi:10.1016/j.rinp.2020.103356

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing
	L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang
刊名	Results in Physics
	2020
卷号	19 页码:10
ISSN号	2211-3797
DOI	10.1016/j.rinp.2020.103356
英文摘要	In computer-controlled optical surfacing (CCOS), the paths of the lap tools are limited inside the optical surface; this restricts convolution in the dwell-time algorithm and causes mid-spatial-frequency surface errors. An optimized strategy ensuring relatively complete convolution of the dwell-time algorithm is developed to control the mid-spatial-frequency surface error and simultaneously ensure high optical manufacturing efficiency. Different-sized lap tools are then introduced to correct the surface error in different areas of the optics. Simulations and experiments using a large off-axis SiC mirror demonstrate the validity of the strategy, and it could be widely applied to CCOS in grinding or polishing processes.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64771]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang. Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing[J]. Results in Physics,2020,19:10.
APA	L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang.(2020).Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing.Results in Physics,19,10.
MLA	L. X. Li,X. C. Li,Q. Cheng,R. G. Li,W. J. Deng,X. Luo,F. Zhang,D. L. Xue and X. J. Zhang."Optimized strategy to restrain the mid-spatial-frequency surface error in computer-controlled optical surfacing".Results in Physics 19(2020):10.