Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving

doi:doi：10.1007/s40684-020-00198-3

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	Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving
	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan
刊名	International Journal of Precision Engineering and Manufacturing-Green Technology
	2020
页码	14
ISSN号	2288-6206
DOI	doi：10.1007/s40684-020-00198-3
英文摘要	Lubrication can improve the tool-workpiece interface condition in ultraprecision machining, especially in microgrooving processes. The aim of this study was to compare the effects of dry, liquid (cutting oil), solid (wax) and hybrid (cutting oil and wax) lubrication conditions, on the creation of arc-sectioned microgrooves on single-crystal silicon wafers using a single-crystal diamond tool. Micro cutting forces, chip morphology, and surface quality at different locations of the grooves were investigated. Rose-shaped continuous chips were observed in dry cutting, indicating stable ductile mode material removal. The entrance side of the groove was always smoother than the exit side with a higher degree of phase transformation. Chip adhesions on the tool edge were found in dry and oil lubricated cutting, whereas wax coating could prevent the adhesion. Wax coating played the dual roles of a chip breaker as well as a high-performance lubricant, thus improved the surface integrity. This study demonstrated the capability of using wax coating as an environmentally friendly solid lubricant for microgrooving of single-crystal silicon and possibly for other hard brittle materials.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64611]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan. Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving[J]. International Journal of Precision Engineering and Manufacturing-Green Technology,2020:14.
APA	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan.(2020).Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving.International Journal of Precision Engineering and Manufacturing-Green Technology,14.
MLA	S. N. A. Kalkhoran,M. Vandati,Z. Y. Zhang and J. W. Yan."Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving".International Journal of Precision Engineering and Manufacturing-Green Technology (2020):14.