Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

doi:10.3390/app10155057

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors
	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao
刊名	Applied Sciences-Basel
	2020
卷号	10 期号:15 页码:13
DOI	10.3390/app10155057
英文摘要	A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are +/- 2.5 '' and +/- 3.5 '' without correction, and the residuals are +/- 1.9 '' and +/- 2.8 '' after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from +/- 4.8 mu m to +/- 2.8 mu m and +/- 5.9 mu m to +/- 3.6 mu m, respectively. The comparison deviation of the roll is +/- 4.3 ''. The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.
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语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64369]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao. Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors[J]. Applied Sciences-Basel,2020,10(15):13.
APA	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao.(2020).Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors.Applied Sciences-Basel,10(15),13.
MLA	C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao."Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors".Applied Sciences-Basel 10.15(2020):13.