Misalignment correction for free-form surface in non-null interferometric testing

doi:10.1016/j.optcom.2018.12.023

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Misalignment correction for free-form surface in non-null interferometric testing
	Z.M.Zang; D.Liu; J.Bai; Y.H.Zhou; T.L.Yan; S.J.Chen; Y.Wang
刊名	Optics Communications
	2019
卷号	437 页码:204-213
关键词	Free-form surface,Surface measurement,Figure,Interferometry,3-dimensional shape measurement,calibration,system,Optics
ISSN号	0030-4018
DOI	10.1016/j.optcom.2018.12.023
英文摘要	Unlike rotational symmetric surfaces, free-form surfaces have sophisticated degrees of freedom, therefore, are more difficult to be aligned. In this work, a practical and accurate correction method is proposed for the misalignment removal of the free-form surface in a non-null interferometric testing system based on computer modeling. The misalignment aberrations, introduced by axial location error, rotation error and non-axial attitude error, are modeled and corrected step by step. The axial and non-axial positions of the free-form surface in the computer model are adjusted from the ideal position to the misaligned one, matching the actual positions in experiment for the correction. Since the modeled position are tuned to be consistent with the actual one, all the misalignment aberrations can be removed from the test wavefront with the reconstruction algorithm. Computer simulations are displayed to verify the accuracy of the proposed method. Experimental results after alignment show basic consistency with the results of Taylor Hobson Profilometer, in which the peak-to-valley (PV) value error of the profile line is better than 1/30 lambda.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/62834]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z.M.Zang,D.Liu,J.Bai,et al. Misalignment correction for free-form surface in non-null interferometric testing[J]. Optics Communications,2019,437:204-213.
APA	Z.M.Zang.,D.Liu.,J.Bai.,Y.H.Zhou.,T.L.Yan.,...&Y.Wang.(2019).Misalignment correction for free-form surface in non-null interferometric testing.Optics Communications,437,204-213.
MLA	Z.M.Zang,et al."Misalignment correction for free-form surface in non-null interferometric testing".Optics Communications 437(2019):204-213.