Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry | |
Peng B(彭博)2; Qu, XH(曲兴华)2; Zhang FM(张福民)2; Tang, Guoqing2; Zhang TY(张天宇)1; Zhao, Xianyu2 | |
刊名 | IEEE Photonics Technology Letters
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2019 | |
卷号 | 31期号:15页码:1285-1288 |
关键词 | Ultrafast optics measurement dispersive interferometry EIIT |
ISSN号 | 1041-1135 |
产权排序 | 2 |
英文摘要 | Method to accurately measure both refractive index and the thickness of glass is investigated. The method combines equal inclination interference with dispersive interferometry. The interference signal, which is detected by the spectrometer, contains different frequencies and can be demodulated with high accuracy. The experiments indicate that the standard deviation of the thickness is better than the 35 nm, while the standard deviation of the measured refractive indices is below 5.76 × 10-6. Furthermore, absolute angles, between 0° and 51°, can be measured with a repeatability within 5′. |
WOS关键词 | GROUP REFRACTIVE-INDEX ; DISTANCE MEASUREMENT ; ARBITRARY DISTANCE ; LONG ; AIR |
WOS研究方向 | Engineering ; Optics ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000476796700022 |
内容类型 | 期刊论文 |
源URL | [http://ir.sia.cn/handle/173321/25310] ![]() |
专题 | 工艺装备与智能机器人研究室 |
通讯作者 | Zhang FM(张福民) |
作者单位 | 1.Shenyang Institute of Automation, Shenyang 110016, China 2.Tianjin University, Tianjin 300072, China |
推荐引用方式 GB/T 7714 | Peng B,Qu, XH,Zhang FM,et al. Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry[J]. IEEE Photonics Technology Letters,2019,31(15):1285-1288. |
APA | Peng B,Qu, XH,Zhang FM,Tang, Guoqing,Zhang TY,&Zhao, Xianyu.(2019).Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry.IEEE Photonics Technology Letters,31(15),1285-1288. |
MLA | Peng B,et al."Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry".IEEE Photonics Technology Letters 31.15(2019):1285-1288. |
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