Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry
Peng B(彭博)2; Qu, XH(曲兴华)2; Zhang FM(张福民)2; Tang, Guoqing2; Zhang TY(张天宇)1; Zhao, Xianyu2
刊名IEEE Photonics Technology Letters
2019
卷号31期号:15页码:1285-1288
关键词Ultrafast optics measurement dispersive interferometry EIIT
ISSN号1041-1135
产权排序2
英文摘要

Method to accurately measure both refractive index and the thickness of glass is investigated. The method combines equal inclination interference with dispersive interferometry. The interference signal, which is detected by the spectrometer, contains different frequencies and can be demodulated with high accuracy. The experiments indicate that the standard deviation of the thickness is better than the 35 nm, while the standard deviation of the measured refractive indices is below 5.76 × 10-6. Furthermore, absolute angles, between 0° and 51°, can be measured with a repeatability within 5′.

WOS关键词GROUP REFRACTIVE-INDEX ; DISTANCE MEASUREMENT ; ARBITRARY DISTANCE ; LONG ; AIR
WOS研究方向Engineering ; Optics ; Physics
语种英语
WOS记录号WOS:000476796700022
内容类型期刊论文
源URL[http://ir.sia.cn/handle/173321/25310]  
专题工艺装备与智能机器人研究室
通讯作者Zhang FM(张福民)
作者单位1.Shenyang Institute of Automation, Shenyang 110016, China
2.Tianjin University, Tianjin 300072, China
推荐引用方式
GB/T 7714
Peng B,Qu, XH,Zhang FM,et al. Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry[J]. IEEE Photonics Technology Letters,2019,31(15):1285-1288.
APA Peng B,Qu, XH,Zhang FM,Tang, Guoqing,Zhang TY,&Zhao, Xianyu.(2019).Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry.IEEE Photonics Technology Letters,31(15),1285-1288.
MLA Peng B,et al."Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry".IEEE Photonics Technology Letters 31.15(2019):1285-1288.
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