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	HARDWARE-IN-LOOP SIMULATION SYSTEM AND METHOD FOR ULTRA-PRECISION MOTION PLATFORM
	Zhang C(张诚); Zhang HL(张华良); Li QX(李庆鑫); Li ZY(李子阳); Wang FD(王福东); Zhao BJ(赵冰洁); Sun HT(孙海涛)
	2021-09-02
著作权人	INNOVATION INSTITUTE OF INTELLIGENT ROBOTICS SHENYANG CO., LTD. ; NATIONAL INSTITUTE OF INTELLIGENT ROBOTICS SHENYANG CO., LTD. ; SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
国家	荷兰
文献子类	发明授权
产权排序	1
其他题名	超精密运动台半实物仿真系统及方法
英文摘要	The present invention relates to a hardware-in-loop simulation system and method for an ultra-precision motion platform. An upper computer is used for building a simulation environment, conducting modeling and simulation test on an ultra-precision motion platform, deploying a simulation program to a control algorithm target machine or a model target machine, and obtaining control parameters of the control algorithm target machine and state parameters of the model target machine. The control algorithm target machine is used for providing the simulation environment for running simulation program real-time codes for the upper computer and running the deployed simulation program in real time, The model target machine is used for providing the simulation environment for running simulation program real-time codes for the upper computer or providing real state parameters of the ultra-precision motion platform. The present invention can accelerate the development speed of the control system of the ultra-precision motion platform, improve the authenticity and credibility of the simulation, enhance the timeliness and transplantability of a control strategy of the system through the combination of real-time simulation and software and hardware of a controller, save cost for development of an ultra-precision control system and also prepare for the industrialization of domestic lithography machines.
公开日期	2021-09-02
申请日期	2020-06-08
语种	英语
状态	有权
内容类型	专利
源URL	[http://ir.sia.cn/handle/173321/30140]
专题	沈阳自动化研究所_工业控制网络与系统研究室
作者单位	1.SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES 2.NATIONAL INSTITUTE OF INTELLIGENT ROBOTICS SHENYANG CO., LTD. 3.INNOVATION INSTITUTE OF INTELLIGENT ROBOTICS SHENYANG CO., LTD.
推荐引用方式 GB/T 7714	Zhang C,Zhang HL,Li QX,et al. HARDWARE-IN-LOOP SIMULATION SYSTEM AND METHOD FOR ULTRA-PRECISION MOTION PLATFORM. 2021-09-02.

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