Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications
Wen YD(文扬东)3,4,5; Yu HB(于海波)4,5; Zhang YZ(章昱昭)3,4,5; Qiu Y(邱野)3,4,5; Li PW(李佩温)3,4,5; Wang XD(王晓朵)4,5; Jia BL(贾伯良)1; Liu LQ(刘连庆)4,5; Li WJ(李文荣)2,4,5
刊名IEEE Open Journal of Nanotechnology
2021
卷号2页码:161-177
关键词femtosecond laser micro/nanostructures laser ablation two-photon polymerization (TPP)
ISSN号2644-1292
产权排序1
英文摘要

Femtosecond laser processing is fast becoming a pervasive method for fabricating micro/nanostructures because it can be used to produce micro/nanostructures on myriads of materials with high precision and resolution, requires little control over environmental conditions, and is simple to implement. Here, we review recent developments in the use of femtosecond lasers for the fabrication of micro/nanostructures through ablation and two-photon polymerization (TPP). Moreover, the applications of some of the fabricated micro/nanostructures are also discussed. We highlight the advantages of femtosecond laser processing by explaining the underlying principles of laser ablation and TPP. We also show the use of this method to fabricate new devices with outstanding performance in several application realm, such as sensors, optical devices, microfluidic chips, and soft robotics.

语种英语
资助机构National Key R&D Program of China (Project No. 2018YFB1304904), the National Natural Science Foundation of China (Grant Nos. 61925307, 61727811, U1613220, and 61821005) ; External Cooperation Program of the Chinese Academy of Sciences (Grant No. 173321KYSB20170015) ; CAS Interdisciplinary Innovation Team (JCTD-2019-09) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. Y201943) ; Hong Kong Research Grants Council (Project Nos. 11216120, 11210819, and JLFS/E-104/18).
内容类型期刊论文
源URL[http://ir.sia.cn/handle/173321/30078]  
专题沈阳自动化研究所_机器人学研究室
通讯作者Liu LQ(刘连庆); Li WJ(李文荣)
作者单位1.College of Optoelectronic Engineering, Shenzhen University, Shenzhen, China
2.Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, SAR, China
3.University of Chinese Academy of Sciences, Beijing 100049, China
4.Institutes for Robotics and Intelligent Manufacturing (IRIM), CAS, Shenyang 110016, China
5.State Key Laboratory of Robotics (SKLR), Shenyang Institute of Automation (SIA), Chinese Academy of Sciences (CAS), Shenyang 110016, China
推荐引用方式
GB/T 7714
Wen YD,Yu HB,Zhang YZ,et al. Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications[J]. IEEE Open Journal of Nanotechnology,2021,2:161-177.
APA Wen YD.,Yu HB.,Zhang YZ.,Qiu Y.,Li PW.,...&Li WJ.(2021).Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications.IEEE Open Journal of Nanotechnology,2,161-177.
MLA Wen YD,et al."Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications".IEEE Open Journal of Nanotechnology 2(2021):161-177.
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