Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review | |
Wang XD(王晓朵)3,4; Yu HB(于海波)3,4; Li PW(李佩温)3,4,5; Zhang, YZ(章昱昭)1,3,4; Wen YD(文扬东)1,3,4; Qiu Y(邱野)1,3,4; Liu Z(刘柱)3,4; Li YP(李云鹏)2,3; Liu LQ(刘连庆)3,4 | |
刊名 | Optics and Laser Technology |
2021 | |
卷号 | 135页码:1-11 |
关键词 | Femtosecond laser processing Parallel processing Microlens array Micro/nano grating Photon crystal Optical fiber |
ISSN号 | 0030-3992 |
产权排序 | 1 |
英文摘要 | The unique advantages of surface and volume processing enabled by femtosecond laser fabrication makes it one of the most powerful tools for manufacturing optical and photonic devices based on complex three-dimensional structures with diverse functions. In this review, we focus on the recent advancements of femtosecond laser fabrication technologies and their versatile applications in different fields (e.g., nanotechnology, soft robotics, optics, and optoelectronics). Herein, the characteristics and development of laser direct writing, spatial light modulator-based fabrication and interference-based approaches are reviewed. Furthermore, typical applications and approaches related to the manufacturing of cutting-edge optical devices including microlens arrays, micro/nano gratings, photonic crystals, and optical fibers are summarized. Finally, the current challenges and emerging trends of this technology are discussed. |
资助项目 | National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[61973298] ; National Natural Science Foundation of China[61803366] ; National Natural Science Foundation of China[61821005] ; External Cooperation Program of Chinese Academy of Sciences[173321KYSB20170015] ; Interdisciplinary Innovation Team of Chinese Academy of Sciences[JCTD-2019-09] ; Liaoning Revitalization Talents Program[XLYC1807006] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences[Y201943] ; Fundamental Research Funds for the Central Universities[D2017020] |
WOS关键词 | PERIODIC SURFACE-STRUCTURES ; LARGE-AREA ; MICROBALL LENS ; BRAGG GRATINGS ; FUSED-SILICA ; FABRICATION ; FIBER ; MICROSTRUCTURES ; INTEGRATION ; UNIFORM |
WOS研究方向 | Optics ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000597289800006 |
资助机构 | National Natural Science Foundation of China [grant numbers 61727811, 61973298, 61803366 and 61821005] ; External Cooperation Program of Chinese Academy of Sciences [grant number 173321KYSB20170015] ; Interdisciplinary Innovation Team of Chinese Academy of Sciences [grant number JCTD-2019-09] ; Liaoning Revitalization Talents Program [grant number XLYC1807006] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences [grant number Y201943] ; Fundamental Research Funds for the Central Universities [grant number D2017020] |
内容类型 | 期刊论文 |
源URL | [http://ir.sia.cn/handle/173321/27910] |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Yu HB(于海波); Liu LQ(刘连庆) |
作者单位 | 1.University of Chinese Academy of Sciences, Beijing 100049, China 2.Criminal Investigation Police University of China, Shenyang 110016, China 3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Science, Shenyang 110016, China 4.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China 5.Northeastern University, Shenyang 110016, China |
推荐引用方式 GB/T 7714 | Wang XD,Yu HB,Li PW,et al. Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review[J]. Optics and Laser Technology,2021,135:1-11. |
APA | Wang XD.,Yu HB.,Li PW.,Zhang, YZ.,Wen YD.,...&Liu LQ.(2021).Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review.Optics and Laser Technology,135,1-11. |
MLA | Wang XD,et al."Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review".Optics and Laser Technology 135(2021):1-11. |
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