Shape reconstruction based on a new blurring model at the micro/nanometer scale

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Shape reconstruction based on a new blurring model at the micro/nanometer scale
	Wei YJ(魏阳杰); Wu CD(吴成东); Wang WX(王文学)
刊名	SENSORS
	2016
卷号	16 期号:3 页码:1-17
关键词	Blurred Imaging Model 3d Shape Heat Diffusion Micro/nanometer Scale Reconstruction
ISSN号	1424-8220
产权排序	1
英文摘要	Real-time observation of three-dimensional (3D) information has great significance in nanotechnology. However, normal nanometer scale observation techniques, including transmission electron microscopy (TEM), and scanning probe microscopy (SPM), have some problems to obtain 3D information because they lack non-destructive, intuitive, and fast imaging ability under normal conditions, and optical methods have not widely used in micro/nanometer shape reconstruction due to the practical requirements and the imaging limitations in micro/nano manipulation. In this paper, a high resolution shape reconstruction method based on a new optical blurring model is proposed. Firstly, the heat diffusion physics equation is analyzed and the optical diffraction model is modified to directly explain the basic principles of image blurring resulting from depth variation. Secondly, a blurring imaging model is proposed based on curve fitting of a 4th order polynomial curve. The heat diffusion equations combined with the blurring imaging are introduced, and their solution is transformed into a dynamic optimization problem. Finally, the experiments with a standard nanogrid, an atomic force microscopy (AFM) cantilever and a microlens have been conducted. The experiments prove that the proposed method can reconstruct 3D shapes at the micro/nanometer scale, and the minimal reconstruction error is 3 nm.
WOS研究方向	Chemistry ; Electrochemistry ; Instruments & Instrumentation
语种	英语
WOS记录号	WOS:000373713600106
资助机构	Natural Science Foundation of China (No. 61305025, 61532007),
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/17715]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Wei YJ(魏阳杰)
作者单位	1.College of Computer Science and Engineering, Northeastern University, Shenyang, China 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Science, Shenyang, China 3.College of Information Science and Engineering, Northeastern University, Shenyang, China
推荐引用方式 GB/T 7714	Wei YJ,Wu CD,Wang WX. Shape reconstruction based on a new blurring model at the micro/nanometer scale[J]. SENSORS,2016,16(3):1-17.
APA	Wei YJ,Wu CD,&Wang WX.(2016).Shape reconstruction based on a new blurring model at the micro/nanometer scale.SENSORS,16(3),1-17.
MLA	Wei YJ,et al."Shape reconstruction based on a new blurring model at the micro/nanometer scale".SENSORS 16.3(2016):1-17.