Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation

	Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation
	JIANBIN MA ; YU SUN ; SHAOWU CHEN
刊名	Applied Optics
	2019
卷号	58 期号:19 页码:5267-5272
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29796]
专题	半导体研究所_光电子研究发展中心
推荐引用方式 GB/T 7714	JIANBIN MA ;YU SUN ; SHAOWU CHEN. Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation[J]. Applied Optics,2019,58(19):5267-5272.
APA	JIANBIN MA ;YU SUN ; SHAOWU CHEN.(2019).Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation.Applied Optics,58(19),5267-5272.
MLA	JIANBIN MA ;YU SUN ; SHAOWU CHEN."Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation".Applied Optics 58.19(2019):5267-5272.