The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter

	The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter
	Li He ; Yaogong Wang; Xiaowu He ; Jie Li; Qi He; Dawei Wei
刊名	VACUUM
	2020
卷号	171 页码:108998
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/30701]
专题	半导体研究所_半导体超晶格国家重点实验室
推荐引用方式 GB/T 7714	Li He ;Yaogong Wang; Xiaowu He ; Jie Li;Qi He; Dawei Wei. The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter[J]. VACUUM,2020,171:108998.
APA	Li He ;Yaogong Wang; Xiaowu He ; Jie Li;Qi He; Dawei Wei.(2020).The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter.VACUUM,171,108998.
MLA	Li He ;Yaogong Wang; Xiaowu He ; Jie Li;Qi He; Dawei Wei."The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter".VACUUM 171(2020):108998.