Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography

doi:10.3390/coatings11010062

	Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
	Jia, Tianxu 3; Wang, Xiangxian 3; Ren, Yaqian 3; Su, Yingwen 3; Zhang, Liping 3; Yang, Hua 3; Qi, Yunping 1; Liu, Weiming 2
刊名	COATINGS
	2021
卷号	11 期号:1 页码:7
关键词	laser interference lithography microstructure incidence angle
DOI	10.3390/coatings11010062
通讯作者	Wang, Xiangxian(wangxx869@lut.edu.cn)
英文摘要	This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transverse magnetic (TM) polarizations and various microstructures are simulated by controlling the high-reflectivity mirror group to adjust the incidence angle. This study indicates that the incidence angle has a considerable influence on the shape and period of the lattice, thereby contributing to the fabrication of microstructures with different arrangements. These structures include donut, circle, D-type, rectangular, triangular, U-type, and honeycomb lattices. The six-beam laser interference lithography technique is expected to benefit microstructure fabrication because of its simple operation, large writing area, and low cost, thereby promoting the development of micro-optics.
资助项目	National Natural Science Foundation of China (NSFC)[61865008] ; Hong Liu First-Class Disciplines Development Program of Lanzhou University of Technology
WOS研究方向	Materials Science
语种	英语
出版者	MDPI
WOS记录号	WOS:000610025000001
资助机构	National Natural Science Foundation of China (NSFC) ; Hong Liu First-Class Disciplines Development Program of Lanzhou University of Technology
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/138217]
专题	中国科学院近代物理研究所
通讯作者	Wang, Xiangxian
作者单位	1.Northwest Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China 2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 3.Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China
推荐引用方式 GB/T 7714	Jia, Tianxu,Wang, Xiangxian,Ren, Yaqian,et al. Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography[J]. COATINGS,2021,11(1):7.
APA	Jia, Tianxu.,Wang, Xiangxian.,Ren, Yaqian.,Su, Yingwen.,Zhang, Liping.,...&Liu, Weiming.(2021).Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography.COATINGS,11(1),7.
MLA	Jia, Tianxu,et al."Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography".COATINGS 11.1(2021):7.