Numerical Study on the Temporal Evolution of a Helicon Discharge

doi:10.1109/TPS.2021.3121396

	Numerical Study on the Temporal Evolution of a Helicon Discharge
	Chang, Yunju 1,2; Chang, Lei 1,2; Yuan, Xiaogang 1,2; Yang, Xin 1; Xu, Qian 1; Wang, Yong 1; Niu, Guojian 1; Zhou, Haishan 1,2; Luo, Guangnan 1,2
刊名	IEEE TRANSACTIONS ON PLASMA SCIENCE
	2021-11-01
卷号	49
关键词	Helicon discharge steady state temporal evolution
ISSN号	0093-3813
DOI	10.1109/TPS.2021.3121396
通讯作者	Chang, Lei(lei.chang@ipp.ac.cn)
英文摘要	A numerical model is developed to study the temporal evolution of helicon discharge. The initiation of helicon discharge is first presented in terms of time-dependent electron density and temperature, electric and magnetic fields, and power deposition; then, their steady-state values are compared with experimental data and previous simulations for benchmark. It is found that the evolutions of electron density and temperature arrive steady state around 100 and 1.5 mu s, respectively, while electric and magnetic fields become steady prior to 2 mu s. The spatial distributions of power deposition indicate that RF power is absorbed mostly near the edge, similar to those of electron temperature. Parameter studies show that high background pressure, confining magnetic field strength, and RF power are beneficial to obtaining high-density helicon plasma, while the driving frequency has little effect. These findings are interesting for the design and optimization of helicon plasma source.
资助项目	Chinese Academy of Sciences 100 Talent Program (B) ; Science Foundation of Institute of Plasma Physics[DSJJ-2020-07]
WOS关键词	PLASMA SOURCE ; DENSITY ; SIMULATIONS
WOS研究方向	Physics
语种	英语
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
WOS记录号	WOS:000719567300062
资助机构	Chinese Academy of Sciences 100 Talent Program (B) ; Science Foundation of Institute of Plasma Physics
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/126554]
专题	中国科学院合肥物质科学研究院
通讯作者	Chang, Lei
作者单位	1.Chinese Acad Sci, Inst Plasma Phys, HFIPS, Hefei 230031, Peoples R China 2.Univ Sci & Technol China, Grad Isl Sci, Hefei 230026, Peoples R China
推荐引用方式 GB/T 7714	Chang, Yunju,Chang, Lei,Yuan, Xiaogang,et al. Numerical Study on the Temporal Evolution of a Helicon Discharge[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2021,49.
APA	Chang, Yunju.,Chang, Lei.,Yuan, Xiaogang.,Yang, Xin.,Xu, Qian.,...&Luo, Guangnan.(2021).Numerical Study on the Temporal Evolution of a Helicon Discharge.IEEE TRANSACTIONS ON PLASMA SCIENCE,49.
MLA	Chang, Yunju,et al."Numerical Study on the Temporal Evolution of a Helicon Discharge".IEEE TRANSACTIONS ON PLASMA SCIENCE 49(2021).