Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma

doi:10.1109/TPS.2021.3101194

CORC > 力学研究所 > 中国科学院力学研究所 > 高温气体动力学国家重点实验室

	Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma
	Wang CS(王传胜)2,3; Liu, Xuhui 1; Geng, Jinyue 1; Li F(李飞)3; Lin X(林鑫)3; Yu XL(余西龙)2,3
刊名	IEEE TRANSACTIONS ON PLASMA SCIENCE
	2021-09-01
卷号	49 期号:9 页码:2806-2816
关键词	E-H mode transition electron energy distribution function (EEDF) helical antenna magnetic
ISSN号	0093-3813
DOI	10.1109/TPS.2021.3101194
通讯作者	Li, Fei(lifei@imech.ac.cn)
英文摘要	We used helical antenna-coupled radio frequency (RF) plasmas to study the evolution of the mode transition power and electron kinetics under different applied magnetic fields and argon pressures. Langmuir probe and emission spectrum data indicate that the discharge mode changes from the capacitive coupling E mode to the inductive coupling H mode through a strong mixed mode (E + H). One reason for this strongly mixed ionization is the antenna structure, which increases the capacitive coupling. Furthermore, the E -> H transition threshold power decreases with increasing pressure regardless of whether there is a magnetic field, and the presence of the magnetic field significantly increases the transition power. The electron energy distribution function (EEDF) curve has a Druyvesteyn shape at low RF power (E mode). The presence of a magnetic field increases the electron energy range, and the binding of the electrons by the magnetic field causes the EEDF to deviate significantly from the Maxwellian shape. As RF power increases, the EEDF tends toward the Maxwellian shape during the transition from the E mode to the H mode. The magnetic field appears to act like a drag on this process, particularly at very low pressures.
分类号	Q4
资助项目	National Natural Science Foundation of China[11927803] ; National Natural Science Foundation of China[11802315] ; Youth Innovation Promotion Association of Chinese Academy of Sciences (CAS) ; Advanced Space Propulsion Technology Laboratory Open Fund
WOS关键词	OPTICAL-EMISSION ; PLANAR COIL ; HYSTERESIS ; FIELD ; GENERATION ; PROPULSION
WOS研究方向	Physics
语种	英语
WOS记录号	WOS:000696080800057
资助机构	National Natural Science Foundation of China ; Youth Innovation Promotion Association of Chinese Academy of Sciences (CAS) ; Advanced Space Propulsion Technology Laboratory Open Fund
其他责任者	Li, Fei
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/87444]
专题	力学研究所_高温气体动力学国家重点实验室
作者单位	1.China Acad Space Technol, Beijing Inst Control Engn, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China; 3.Chinese Acad Sci, Inst Mech, State Key Lab High Temp Gas Dynam, Beijing 100190, Peoples R China;
推荐引用方式 GB/T 7714	Wang CS,Liu, Xuhui,Geng, Jinyue,et al. Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2021,49(9):2806-2816.
APA	王传胜,Liu, Xuhui,Geng, Jinyue,李飞,林鑫,&余西龙.(2021).Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma.IEEE TRANSACTIONS ON PLASMA SCIENCE,49(9),2806-2816.
MLA	王传胜,et al."Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma".IEEE TRANSACTIONS ON PLASMA SCIENCE 49.9(2021):2806-2816.