Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices
	Zheng MJ(郑美娟); Qu YL(曲艳丽); Zhang, YZ; Dong ZL(董再励)
刊名	INTEGRATED FERROELECTRICS
	2013
卷号	145 期号:1 页码:24-31
关键词	Optically induced dielectrophoresis automatic assembly micro nano-devices rapid and precise manipulation
ISSN号	1058-4587
通讯作者	郑美娟
产权排序	1
中文摘要	Optically induced dielectrophoresis (ODEP) provides a powerful method for parallel manipulation of micro/nano-scale particles with dynamic optical patterns. Until now, few ODEP-related researches has been done for automatic assembly of micro/nano-devices which have a profound effect on the application of nanomaterials. In this paper, an innovative ODEP platform is investigated for automatic and repeatable micro/nano-scale material assembly by integrating image acquisition module, image analysis module, light pattern generation module with micro step motion module. Image analysis module was successfully designed to automatically analyze the images obtained from the image acquisition module and recognize the shape and position of the manipulated objects in the images. The programed light pattern generation module allows for arbitrary and reconfigurable optical patterns based on the recognition results. A high resolution 3D motorized stage upon which the ODEP chip is fixed offers rapid and precise movement of the chip in micro scale. The automatic patterning of polystyrene beads and assembling of multi-walled carbon nanotubes (MWCNTs) into array had been accomplished by the ODEP platform. Experiment results proved that our platform is very effective and shows a promising potential for automatic assembly of micro/nano-devices in wafer-scale requiring massively parallel manipulation.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]	Engineering ; Physics
关键词[WOS]	PARTICLES ; TWEEZERS
收录类别	SCI ; EI
资助信息	Natural Science Foundation of China [61107043]; State Key Laboratory of Robotics [2009Z02]; CAS/SAFEA
语种	英语
WOS记录号	WOS:000321687200004
公开日期	2013-10-05
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/12558]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Zheng MJ,Qu YL,Zhang, YZ,et al. Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices[J]. INTEGRATED FERROELECTRICS,2013,145(1):24-31.
APA	Zheng MJ,Qu YL,Zhang, YZ,&Dong ZL.(2013).Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices.INTEGRATED FERROELECTRICS,145(1),24-31.
MLA	Zheng MJ,et al."Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices".INTEGRATED FERROELECTRICS 145.1(2013):24-31.