A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field

doi:10.1063/5.0024079

	A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field
	Fang, Shaoxi 1,3; Yin, Bohua 1,2; Xie, Wanyi 1,3; Zhou, Daming 1,3; Tang, Peng 1,3; He, Shixuan 1,3; Yuan, Jiahu 1,3; Wang, Deqiang 1,3
刊名	REVIEW OF SCIENTIFIC INSTRUMENTS
	2020-09-01
卷号	91 期号:9 页码:6
ISSN号	0034-6748
DOI	10.1063/5.0024079
通讯作者	He, Shixuan(heshixuan@cigit.ac.cn) ; Yuan, Jiahu(yjh@cigit.ac.cn) ; Wang, Deqiang(dqwang@cigit.ac.cn)
英文摘要	The dielectric breakdown used to fabricate solid-state nanopores has separated the device from capital-intensive industries and has been widely adopted by various research teams, but there are still problems with low production efficiency and uncertain location. In this work, based on the transient breakdown phenomenon of nanofilms, a new type of dielectric breakdown apparatus for nanopore fabrication is reported. It integrates both nano-manipulation technology and dielectric breakdown nanopore fabrication technology. The nanometer distance detection method and circuit are introduced in detail. The generation principle and procedures of the transient high electric field are explained step by step. The characterization of the nanopores shows that this apparatus can fabricate sub-2 nm nanopores at a pre-located position. Besides, the nanopore diameter can be easily adjusted by setting the transient high electric field value.
资助项目	Youth Innovation Foundation of CIGIT ; Natural Science Foundation of Chongqing, China[cstc2018jcyjAX0310] ; Natural Science Foundation of Chongqing, China[cstc2017jcyjB0105] ; Natural Science Foundation of Chongqing, China[cstc2018jcyjAX0304] ; National Natural Science Foundation of China[61701474] ; National Natural Science Foundation of China[31800711] ; Instrument Development Program of CAS[YZ201568]
WOS研究方向	Instruments & Instrumentation ; Physics
语种	英语
出版者	AMER INST PHYSICS
WOS记录号	WOS:000575126400001
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/11856]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	He, Shixuan; Yuan, Jiahu; Wang, Deqiang
作者单位	1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China 2.Changchun Univ Sci & Technol, Changchun 130022, Jilin, Peoples R China 3.Univ Chinese Acad Sci, Chongqing Sch, Chongqing 400714, Peoples R China
推荐引用方式 GB/T 7714	Fang, Shaoxi,Yin, Bohua,Xie, Wanyi,et al. A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2020,91(9):6.
APA	Fang, Shaoxi.,Yin, Bohua.,Xie, Wanyi.,Zhou, Daming.,Tang, Peng.,...&Wang, Deqiang.(2020).A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field.REVIEW OF SCIENTIFIC INSTRUMENTS,91(9),6.
MLA	Fang, Shaoxi,et al."A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field".REVIEW OF SCIENTIFIC INSTRUMENTS 91.9(2020):6.