Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements

doi:10.1063/1.5137755

	Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements
	Zhang, Man 1; Xia, Liang-ping 1,2; Dang, Sui-hu 1; Cao, A-xiu 3; Shi, Li-fang 3; Du, Chun-lei 1,2
刊名	AIP ADVANCES
	2020-03-01
卷号	10 期号:3 页码:6
DOI	10.1063/1.5137755
通讯作者	Zhang, Man(zhangman881003@126.com)
英文摘要	In this paper, effective fabrication of high-resolution diffractive optical elements on a polymer substrate is demonstrated using roller nanoimprint lithography. A nanoscale diffraction grating mold, which can generate a random laser pattern, is fabricated by scan-and-repeat projection lithography. The mold is imprinted to a thin polymer on the soft substrate via roller nanoimprint lithography, which has high efficiency, high fidelity, and high throughput for mass production. This fabrication process can produce high-resolution nanostructures while reducing the cost substantially. We obtained large-area polymer diffractive optical elements with a flexible substrate, which can generate high-quality diffraction random lattice patterns with sub-250 nm resolution for an 808-nm wavelength laser. The diffractive optical elements have about 83.2% diffraction efficiency and 99.7% uniformity of random pattern intensity. It is believed that this fabrication technique can promote practical applications of diffractive optical elements, such as laser wavefront correction, face and activity recognition, and optical communication.
资助项目	National Natural Science Foundation of China (NSFC)[51703227] ; National Natural Science Foundation of China (NSFC)[C0025053] ; National Natural Science Foundation of China (NSFC)[61775213] ; National Natural Science Foundation of China (NSFC)[61605211] ; National Natural Science Foundation of China (NSFC)[61504147] ; Sichuan Science and Technology Program[2017RZ0031] ; Sichuan Science and Technology Program[2019YJ0014] ; Instrument Development of Chinese Academy of Sciences ; National R&D Program of China[2017YFC0804900] ; Youth Innovation Promotion Association of Chinese Academy of Sciences
WOS研究方向	Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
出版者	AMER INST PHYSICS
WOS记录号	WOS:000521949400002
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/10746]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Zhang, Man
作者单位	1.Yangtze Normal Univ, Sch Elect Informat Engn, Chongqing 408100, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Man,Xia, Liang-ping,Dang, Sui-hu,et al. Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements[J]. AIP ADVANCES,2020,10(3):6.
APA	Zhang, Man,Xia, Liang-ping,Dang, Sui-hu,Cao, A-xiu,Shi, Li-fang,&Du, Chun-lei.(2020).Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements.AIP ADVANCES,10(3),6.
MLA	Zhang, Man,et al."Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements".AIP ADVANCES 10.3(2020):6.